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Volumn , Issue , 2008, Pages

Stress-induced lift-off method for kerf-loss-free wafering of ultra-thin (∼50 μm) crystalline Si wafers

Author keywords

[No Author keywords available]

Indexed keywords

2-D FINITE ELEMENT METHOD; CRACK INITIATION AND PROPAGATION; CRYSTALLINE SI WAFERS; CRYSTALLINE SILICONS; HETEROJUNCTION EMITTERS; MULTI-CRYSTALLINE SILICON; MULTI-LAYERED STRUCTURE; SILICON CONSUMPTION;

EID: 84879729900     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2008.4922741     Document Type: Conference Paper
Times cited : (15)

References (14)
  • 1
    • 84879723370 scopus 로고
    • MA Green, ED-31 , No 5, 1984
    • (1984) , vol.ED-31 , Issue.5
    • Green, M.1
  • 3
    • 84879711126 scopus 로고    scopus 로고
    • K. A. Munzer, vol. 46, No 10, 1999
    • (1999) , vol.46 , Issue.10
    • Munzer, K.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.