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Volumn 949, Issue , 2013, Pages 153-168
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Rapid prototyping of PDMS devices using su-8 lithography
a,b,c |
Author keywords
Micro fluidics; PDMS; Plasma bonding; Polymethyldisiloxane; Soft lithography; SU 8
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Indexed keywords
ADHESION;
ARTICLE;
CONTAMINATION;
CROSS LINKING;
HIGH TEMPERATURE;
MICROFLUIDICS;
PARTICULATE MATTER;
PHASE CONTRAST MICROSCOPE;
POLYMETHYLDISILOXANE DEVICE;
PRIORITY JOURNAL;
ROOM TEMPERATURE;
SU 8 LITHOGRAPHY;
CHEMISTRY;
EQUIPMENT;
MICROFLUIDIC ANALYSIS;
PLASMA GAS;
PRINTING;
TIME;
BAYSILON;
DIMETICONE;
EPOXIDE;
OXYGEN;
POLYMER;
SU 8 COMPOUND;
SU-8 COMPOUND;
DIMETHYLPOLYSILOXANES;
EPOXY COMPOUNDS;
MICROFLUIDIC ANALYTICAL TECHNIQUES;
OXYGEN;
PLASMA GASES;
POLYMERS;
PRINTING;
TIME FACTORS;
MLCS;
MLOWN;
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EID: 84879316940
PISSN: 10643745
EISSN: None
Source Type: Book Series
DOI: 10.1007/978-1-62703-134-9_11 Document Type: Article |
Times cited : (17)
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References (9)
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