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Volumn 949, Issue , 2013, Pages 153-168

Rapid prototyping of PDMS devices using su-8 lithography

Author keywords

Micro fluidics; PDMS; Plasma bonding; Polymethyldisiloxane; Soft lithography; SU 8

Indexed keywords

ADHESION; ARTICLE; CONTAMINATION; CROSS LINKING; HIGH TEMPERATURE; MICROFLUIDICS; PARTICULATE MATTER; PHASE CONTRAST MICROSCOPE; POLYMETHYLDISILOXANE DEVICE; PRIORITY JOURNAL; ROOM TEMPERATURE; SU 8 LITHOGRAPHY; CHEMISTRY; EQUIPMENT; MICROFLUIDIC ANALYSIS; PLASMA GAS; PRINTING; TIME;

EID: 84879316940     PISSN: 10643745     EISSN: None     Source Type: Book Series    
DOI: 10.1007/978-1-62703-134-9_11     Document Type: Article
Times cited : (17)

References (9)
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    • (1998) Anal Chem , vol.70 , pp. 4974-4984
    • Duffy, D.C.1    McDonald, J.C.2    Oja, S.3    Whitesides, G.M.4
  • 4
    • 84892912451 scopus 로고    scopus 로고
    • MicroChem Corp Accessed 12 Nov 2012
    • MicroChem (2011) MicroChem Corp. http://www.microchem.com/Prod-SU82000. htm . Accessed 12 Nov 2012
    • (2011) MicroChem
  • 5
    • 0036693343 scopus 로고    scopus 로고
    • Reduction of diffraction effect of UV exposure on SU-8 negative thick photoresist by air gap elimination
    • Chuang YJ, Tseng FG, Lin WK (2002) Reduction of diffraction effect of UV exposure on SU-8 negative thick photoresist by air gap elimination. Microsyst Technol 8: 308-313
    • (2002) Microsyst Technol , vol.8 , pp. 308-313
    • Chuang, Y.J.1    Tseng, F.G.2    Lin, W.K.3
  • 6
    • 22444435567 scopus 로고    scopus 로고
    • Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength
    • Bhattacharya S, Datta A, Berg JM, Gangopadhyay S (2005) Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength. J Microelectromech Syst 14:590-597
    • (2005) J Microelectromech Syst , vol.14 , pp. 590-597
    • Bhattacharya, S.1    Datta, A.2    Berg, J.M.3    Gangopadhyay, S.4
  • 7
    • 0028715142 scopus 로고
    • Plasma treatment of polydimethylsiloxane
    • Owen MJ, Smith PJ (1994) Plasma treatment of polydimethylsiloxane. J Adhes Sci Technol 8:1063-1075
    • (1994) J Adhes Sci Technol , vol.8 , pp. 1063-1075
    • Owen, M.J.1    Smith, P.J.2
  • 8
    • 84892936862 scopus 로고    scopus 로고
    • Accessed 12 Nov 2012
    • MEMS Talk - General MEMS discussion. http://mail.mems-exchange.org/ mailman/listinfo/mems-Talk . Accessed 12 Nov 2012
    • MEMS Talk - General MEMS Discussion


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.