Computational solution of inverse directed self-assembly problem

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8680, Issue , 2013, Pages

  Latypov, Azat ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

BCP; Block copolymers; Directed self assembly; DSA; Inverse problem; Proximity correction

Indexed keywords

BCP; COMPUTATIONAL SOLUTIONS; CONTACT HOLES; DIRECT PROBLEMS; DIRECTED SELF-ASSEMBLY; DSA; OBJECTIVE FUNCTIONS; PROXIMITY CORRECTION;

BLOCK COPOLYMERS; SELF ASSEMBLY;

INVERSE PROBLEMS;

EID: 84878415990     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.2011575     Document Type: Conference Paper

References (7)

1. Herr, D.J.C. "Directed block copolymer self-assembly for nanoelectronics fabrication," Journal of Materials Research, vol. 26, issue 02, pp. 122-139 (2011).
2. Fredrickson, G. H., [The Equilibrium Theory of Inhomogeneous Polymers], Oxford University Press (2006).
3. Yi, H., Bao, X., Zhang, J., Tiberio, R., Conway, J., Chang, L.-W., Mitra, S., Wong, H.-S. P., "Contact Hole Patterning for Random Logic Circuits using Block Copolymer Directed Self-Assembly," SPIE 2012, Conferences on Alternative Lithographic Technologies IV, paper 8323-31.
4. Takahashi, H., Laachi, N., Delaney, K. T., Hur, S.-M., Weinheimer, C. J., Shykind, D. and Fredrickson, G. H., "Defectivity in Laterally Confined Lamella-Forming Diblock Copolymers: Thermodynamic and Kinetic Aspects," Macromolecules, 45(15), 6553-6265 (2012).
5. Matsen, M.W., "Thin films of block copolymer," J. Chem. Phys., 106, 7781-7791 (1997).
6. Ceniceros, H. D. and Fredrickson, G. H., "Numerical Solution of Polymer Self-Consistent Field Theory," SIAM Multiscale Modeling and Simulation, 2, 452-474 (2004).
7. Ma, X. and Arce, G.R., [Computational Lithography], John Wiley & Sons (2010).