Ozone priming of patterned carbon nanotube forests for subsequent atomic layer deposition-like deposition of SiO2 for the preparation of microfabricated thin layer chromatography plates

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 31, Issue 3, 2013, Pages

  Jensen, David S ^a   Kanyal, Supriya S ^a   Madaan, Nitesh ^a   Miles, Andrew J ^b   Davis, Robert C ^a   Vanfleet, Richard ^a   Vail, Michael A ^b   Dadson, Andrew E ^b   Linford, Matthew R ^a  

^a Brigham Young University   (United States)

^b Diamond Analytics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; DEPOSITION; FORESTRY; MICROFABRICATION; OZONE; OZONIZATION; PHOTOELECTRONS; SILICA; THIN LAYER CHROMATOGRAPHY; X RAY PHOTOELECTRON SPECTROSCOPY;

3-AMINOPROPYLTRIETHOXYSILANE; ALTERNATING LAYERS; DIFFERENT GEOMETRY; ELEVATED TEMPERATURE; FABRICATION PROCESS; MOBILE-PHASE VELOCITY; THIN-LAYER CHROMATOGRAPHY PLATE; VERTICALLY ALIGNED CARBON NANOTUBE;

ATOMIC LAYER DEPOSITION;

CARBON; CHROMATOGRAPHY; DEPOSITION; ESCA; FORESTRY; OZONE; OZONIZATION; PHOTOELECTRONS; SILICA; X RAY SPECTROSCOPY;

EID: 84878351329     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.4801834     Document Type: Article

References (56)

1. J. Song, Adv. Funct. Mater. 21, 1132 (2011). 10.1002/adfm.201001851
2. J. Billen and G. Desmet, J. Chromatogr. A 1168, 73 (2007). 10.1016/j.chroma.2007.07.069
3. J. H. Knox, J. Chromatogr. A 831, 3 (1999). 10.1016/S0021-9673(98)00497-X
4. S. S. Kanyal, J. Vac. Sci. Technol. B 31, 031203 (2013). 10.1116/1.4795859
5. D. S. Jensen, Surf. Interface Anal. (available online). 10.1002/sia.5268
6. D. S. Jensen, S. S. Kanyal, V. Gupta, M. A. Vail, A. E. Dadson, M. Engelhard, R. Vanfleet, R. C. Davis, and M. R. Linford, J. Chromatogr. A 1257, 195 (2012). 10.1016/j.chroma.2012.07.086
7. D. Hausmann, J. Becker, S. Wang, and R. G. Gordon, Science 298, 402 (2002). 10.1126/science.1073552
8. F. Zhang, K. Sautter, A. M. Larsen, D. A. Findley, R. C. Davis, H. Samha, and M. R. Linford, Langmuir 26, 14648 (2010). 10.1021/la102447y
9. A. S. Cavanagh, C. A. Wilson, A. W. Weimer, and S. M. George, Nanotechnol. 20, 255602 (2009). 10.1088/0957-4484/20/25/255602
10. C. F. Herrmann, F. H. Fabreguette, D. S. Finch, R. Geiss, and S. M. George, Appl. Phys. Lett. 87, 123110 (2005). 10.1063/1.2053358
11. D. B. Farmer and R. G. Gordon, Electrochem. Solid-State Lett. 8, G89 (2005). 10.1149/1.1862474
12. D. B. Farmer and R. G. Gordon, Nano Lett. 6, 699 (2006). 10.1021/nl052453d
13. J. D. Whittaker, M. Brink, G. A. Husseini, M. R. Linford, and R. C. Davis, Appl. Phys. Lett. 83, 5307 (2003). 10.1063/1.1636267
14. Q. An, A. N. Rider, and E. T. Thostenson, Carbon 50, 4130 (2012). 10.1016/j.carbon.2012.04.061
15. O. Byl, J. Liu, and J. T. Yates, Langmuir 21, 4200 (2005). 10.1021/la040132w
16. D. B. Mawhinney, V. Naumenko, A. Kuznetsova, J. T. Yates, J. Liu, and R. E. Smalley, J. Am. Chem. Soc. 122, 2383 (2000). 10.1021/ja994094s
17. L. C. Tang, H. Zhang, J. H. Han, X. P. Wu, and Z. Zhang, Compos. Sci. Technol. 72, 7 (2011). 10.1016/j.compscitech.2011.07.016
18. X. Lu, L. Zhang, X. Xu, N. Wang, and Q. Zhang, J. Phys. Chem. B 106, 2136 (2002). 10.1021/jp015537t
19. H. E. Hauck and M. Schulz, J. Chromatogr. Sci. 40, 550 (2002).
20. H. Hauck and M. Schulz, Chromatographia 57, S313 (2003). 10.1007/BF02492122
21. H. Hauck, O. Bund, W. Fischer, and M. Schulz, J. Planar Chromatogr. 14, 234 (2001). 10.1556/JPC.14.2001.4.2
22. A. M. Frolova, M. A. Chukhlieb, A. V. Drobot, A. P. Kryshtal, L. P. Loginova, and A. P. Boichenko, Open Surf. Sci. J. 1, 40 (2009). 10.2174/1876531900901010040
23. A. M. Frolova, O. Y. Konovalova, L. P. Loginova, A. V. Bulgakova, and A. P. Boichenko, J. Sep. Sci. 34, 2352 (2011). 10.1002/jssc.201100178
24. I. Urbanova and F. Svec, J. Sep. Sci. 34, 2345 (2011). 10.1002/jssc.201100202
25. Y. Han, P. Levkin, I. Abarientos, H. Liu, F. Svec, and J. M. J. Fréchet, Anal. Chem. 82, 2520 (2010). 10.1021/ac100010h
26. R. Bakry, G. K. Bonn, D. Mair, and F. Svec, Anal. Chem. 79, 486 (2006). 10.1021/ac061527i
27. J. E. Clark and S. V. Olesik, J. Chromatogr. A 1217, 4655 (2010). 10.1016/j.chroma.2010.04.078
28. J. E. Clark and S. V. Olesik, Anal. Chem. 81, 4121 (2009). 10.1021/ac9004293
29. L. W. Bezuidenhout and M. J. Brett, J. Chromatogr. A 1183, 179 (2008). 10.1016/j.chroma.2007.12.089
30. H. E. Bergna and W. O. Roberts, Colloidal Silica: Fundamentals and Applications (Taylor Francis, Boca Raton, 2006).
31. J. Köhler and J. J. Kirkland, J. Chromatogr. A 385, 125 (1987). 10.1016/S0021-9673(01)94628-X
32. C. F. Poole and S. K. Poole, Anal. Chem. 61, 1257 A (1989). 10.1021/ac00197a001
33. S. K. Poole and C. F. Poole, J. Chromatogr. A 1218, 2648 (2011). 10.1016/j.chroma.2010.10.072
34. C. F. Poole, The Essence of Chromatography, 1st ed. (Elsevier Science, Amsterdam, 2003).
35. Instrumental HPTLC, edited by, W. Bertsch, S. Hara, R. E. Kaiser, and, A. Zlatkis, (Huethig, Heidelberg, 1980).
36. B. Spangenberg, C. F. Poole, and C. Wiens, Quantitative Thin-Layer Chromatography: A Practical Survey (Springer, New York, 2011).
37. M. Prosek, A. Golc-Wondra, and I. Vovk, J. Planar Chromatogr. 14, 100 (2001).
38. C. F. Poole, J. Planar Chromatogr. 1, 373 (1988).
39. F. Zhang, R. J. Gates, V. S. Smentkowski, S. Natarajan, B. K. Gale, R. K. Watt, M. C. Asplund, and M. R. Linford, J. Am. Chem. Soc. 129, 9252 (2007). 10.1021/ja072250m
40. D. S. Jensen, N. Madaan, S. S. Kanyal, M. A. Vail, M. Engelhard, and M. R. Linford, " XPS of a multiwalled carbon nanotube forest grown via chemical vapor deposition from iron catalyst nanoparticles.," Surf. Sci. Spectra (submitted).
41. M. Li, Y. Gu, Y. Liu, Y. Li, and Z. Zhang, Carbon 52, 109 (2013). 10.1016/j.carbon.2012.09.011
42. C. K. Liu, J. M. Wu, and H. C. Shih, Sens. Actuators B 150, 641 (2010). 10.1016/j.snb.2010.08.026
43. K. A. Wepasnick, B. A. Smith, J. L. Bitter, and D. Howard Fairbrother, Anal. Bioanal. Chem. 396, 1003 (2010). 10.1007/s00216-009-3332-5
44. J. Yan, Carbon 48, 1731 (2010). 10.1016/j.carbon.2010.01.014
45. C. M. Chen, J. Q. Huang, Q. Zhang, W. Z. Gong, Q. H. Yang, M. Z. Wang, and Y. G. Yang, Carbon 50, 659 (2012). 10.1016/j.carbon.2011.09.022
46. C. M. Chen, Q. Zhang, M. G. Yang, C. H. Huang, Y. G. Yang, and M. Z. Wang, Carbon 50, 3572 (2012). 10.1016/j.carbon.2012.03.029
47. B. W. Muir, S. L. Mc Arthur, H. Thissen, G. P. Simon, H. J. Griesser, and D. G. Castner, Surf. Interface Anal. 38, 1186 (2006). 10.1002/sia.2363
48. T. L. Niederhauser, Y. Y. Lua, G. Jiang, S. D. Davis, R. Matheson, D. A. Hess, I. A. Mowat, and M. R. Linford, Angew. Chem. Int. Ed. 41, 2353 (2002). 10.1002/1521-3773(20020703)41:13<2353::AID-ANIE2353>3.0.CO;2-B
49. Y. Y. Lua, W. J. J. Fillmore, L. Yang, M. V. Lee, P. B. Savage, M. C. Asplund, and M. R. Linford, Langmuir 21, 2093 (2005). 10.1021/la047338h
50. J. Terry, M. R. Linford, C. Wigren, R. Cao, P. Pianetta, and C. E. D. Chidsey, Appl. Phys. Lett. 71, 1056 (1997). 10.1063/1.119726
51. B. V. Crist, J. Surf. Anal. 4, 428 (1998).
52. H. Ganegoda, D. S. Jensen, D. Olive, L. Cheng, C. U. Segre, M. R. Linford, and J. Terry, J. Appl. Phys. 111, 053705 (2012). 10.1063/1.3691888
53. K. L. Mittal, in Surface Contamination: Genesis, Detection and Control, edited by, K. L. Mittal, (Plenum, New York, 1979), Vol. 1, p. 3.
54. C. Kingston, Y. Martínez-Rubí, J. Guan, M. Barnes, C. Scriver, R. Sturgeon, and B. Simard, Anal. Bioanal. Chem. 396, 1037 (2010). 10.1007/s00216-009-3205-y
55. B. Fried and J. Sherma, Thin-Layer Chromatography, 4th ed. (Marcel Dekker, New York, 1999).
56. See supplementary material at http://dx.doi.org/10.1116/1.4801834 E-JVTBD9-31-344303 for experimental conditions and images of chromatograms (developed plates).