Design of dissolved oxygen microsensor using Low Temperature Co-fired Ceramics (LTCC)

IMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006

Volumn , Issue , 2006, Pages 302-306

  Chaves Ferreira, Marcos Aparecido ^a   Da Rocha, Zaira Mendes ^a   Seabra, Antonio C ^a   Gongora Rubio, Mário R ^b  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b Instituto de Pesquisas Tecnologicas   (Brazil)

Author keywords

Dissolved oxygen; LTCC; Water quality

Indexed keywords

CONTINUOUS MONITORING; ENVIRONMENTAL MONITORING; FABRICATION AND CHARACTERIZATIONS; LOW-TEMPERATURE CO-FIRED CERAMICS; LTCC; SENSOR PERFORMANCE; SILICON SUBSTRATES; THIN-FILM TECHNOLOGY;

ALUMINA; DISSOLVED OXYGEN; DISSOLVED OXYGEN SENSORS; EXHIBITIONS; MICROSYSTEMS; SENSORS; TECHNOLOGY; TEMPERATURE; WATER QUALITY;

CERAMIC MATERIALS;

EID: 84878250947     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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