메뉴 건너뛰기




Volumn 88, Issue , 2013, Pages 159-200

Transparent Conductive Oxides for Transparent Electrode Applications

Author keywords

FTO; ITO; Magnetron sputtering; MOCVD; Oxide semiconductor; TCO; Thin film; Transparent conducting oxide; Transparent electrode; ZnO

Indexed keywords

CARRIER CONCENTRATION; FLAT PANEL DISPLAYS; II-VI SEMICONDUCTORS; INDIUM COMPOUNDS; MAGNETIC SEMICONDUCTORS; MAGNETRON SPUTTERING; METALLORGANIC CHEMICAL VAPOR DEPOSITION; METALS; MOS DEVICES; OPTICAL PROPERTIES; OXIDE MINERALS; OXIDE SEMICONDUCTORS; THIN FILM SOLAR CELLS; THIN FILMS; TRANSPARENT CONDUCTING OXIDES; WIDE BAND GAP SEMICONDUCTORS; ZINC OXIDE;

EID: 84878143542     PISSN: 00808784     EISSN: None     Source Type: Book Series    
DOI: 10.1016/B978-0-12-396489-2.00005-9     Document Type: Chapter
Times cited : (26)

References (129)
  • 1
    • 1642299625 scopus 로고    scopus 로고
    • Low resistivity transparent conducting Al-doped ZnO films prepared by pulsed laser deposition
    • Agura H., Suzuki A., Matsushita T., Aoki T., Okuda M. Low resistivity transparent conducting Al-doped ZnO films prepared by pulsed laser deposition. Thin Solid Films 2003, 44:263.
    • (2003) Thin Solid Films , vol.44 , pp. 263
    • Agura, H.1    Suzuki, A.2    Matsushita, T.3    Aoki, T.4    Okuda, M.5
  • 2
    • 41649103043 scopus 로고    scopus 로고
    • Diffusion and thermal stability of hydrogen in ZnO
    • Bang J., Chang K.J. Diffusion and thermal stability of hydrogen in ZnO. Appl. Phys. Lett. 2008, 92:132109.
    • (2008) Appl. Phys. Lett. , vol.92 , pp. 132109
    • Bang, J.1    Chang, K.J.2
  • 3
    • 0001371339 scopus 로고
    • Band-gap narrowing in heavily doped many-valley semiconductors
    • Berggren K.F., Sermelius B.E. Band-gap narrowing in heavily doped many-valley semiconductors. Phys. Rev. B 1981, 24:1971.
    • (1981) Phys. Rev. B , vol.24 , pp. 1971
    • Berggren, K.F.1    Sermelius, B.E.2
  • 4
    • 36148962857 scopus 로고    scopus 로고
    • Transparent conducting oxide films for thin film silicon photovoltaics
    • Beyer W., Hüpkes J., Stiebig H. Transparent conducting oxide films for thin film silicon photovoltaics. Thin Solid Films 2007, 516:147.
    • (2007) Thin Solid Films , vol.516 , pp. 147
    • Beyer, W.1    Hüpkes, J.2    Stiebig, H.3
  • 5
    • 0000642431 scopus 로고
    • Scattering by ionized impurities in semiconductors
    • Brooks H. Scattering by ionized impurities in semiconductors. Phys. Rev. 1951, 83:879.
    • (1951) Phys. Rev. , vol.83 , pp. 879
    • Brooks, H.1
  • 6
    • 0007639852 scopus 로고
    • Theory of the electrical properties of germanium and silicon
    • Brooks H. Theory of the electrical properties of germanium and silicon. Adv. Electron. Electron Phys. 1955, 7:85.
    • (1955) Adv. Electron. Electron Phys. , vol.7 , pp. 85
    • Brooks, H.1
  • 8
    • 33646202250 scopus 로고
    • Anomalous optical absorption limit in InSb
    • Burstein E. Anomalous optical absorption limit in InSb. Phys. Rev. 1954, 93:632.
    • (1954) Phys. Rev. , vol.93 , pp. 632
    • Burstein, E.1
  • 10
    • 0034246829 scopus 로고    scopus 로고
    • Characterization of transparent conducting oxides
    • Coutts T.J., Young D.L., Li X. Characterization of transparent conducting oxides. MRS Bull. 2000, 25:58.
    • (2000) MRS Bull. , vol.25 , pp. 58
    • Coutts, T.J.1    Young, D.L.2    Li, X.3
  • 12
    • 79960531232 scopus 로고    scopus 로고
    • Optical enhancement and losses of pyramid textured thin-film silicon solar cells
    • Dewan R., Vasilev I., Jovanov V.V., Knipp D. Optical enhancement and losses of pyramid textured thin-film silicon solar cells. J. Appl. Phys. 2010, 110:013101.
    • (2010) J. Appl. Phys. , vol.110 , pp. 013101
    • Dewan, R.1    Vasilev, I.2    Jovanov, V.V.3    Knipp, D.4
  • 13
    • 0000804317 scopus 로고
    • Scattering of electrons and holes by charged donors and acceptors in semiconductors
    • Dingle R.B. Scattering of electrons and holes by charged donors and acceptors in semiconductors. Philos. Mag. 1955, 46:831.
    • (1955) Philos. Mag. , vol.46 , pp. 831
    • Dingle, R.B.1
  • 16
    • 36149020912 scopus 로고
    • Neutral impurity scattering in semiconductors
    • Erginsoy C. Neutral impurity scattering in semiconductors. Phys. Rev. 1950, 79:1013.
    • (1950) Phys. Rev. , vol.79 , pp. 1013
    • Erginsoy, C.1
  • 20
    • 84985579906 scopus 로고
    • Untersuchungen an halbleitenden Indiumoxydschichten
    • Groth R. Untersuchungen an halbleitenden Indiumoxydschichten. Phys. Status Solidi B 1966, 14:69.
    • (1966) Phys. Status Solidi B , vol.14 , pp. 69
    • Groth, R.1
  • 21
    • 0016992850 scopus 로고
    • New figure of merit for transparent conductors
    • Haacke G. New figure of merit for transparent conductors. J. Appl. Phys. 1976, 47:4086.
    • (1976) J. Appl. Phys. , vol.47 , pp. 4086
    • Haacke, G.1
  • 24
    • 0036607416 scopus 로고    scopus 로고
    • Electrical conductivity control in transparent p-type (LaO)CuS thin films prepared by rf sputtering
    • Hiramatsu H., Orita M., Hirano M., Ueda K., Hosono H. Electrical conductivity control in transparent p-type (LaO)CuS thin films prepared by rf sputtering. J. Appl. Phys. 2002, 91:9177.
    • (2002) J. Appl. Phys. , vol.91 , pp. 9177
    • Hiramatsu, H.1    Orita, M.2    Hirano, M.3    Ueda, K.4    Hosono, H.5
  • 27
    • 0024667131 scopus 로고
    • 2: F films by CMD (chemical mist deposition) method
    • (English translation of Denki Gakkai Ronbunshi)
    • 2: F films by CMD (chemical mist deposition) method. Electr. Eng. Jpn. 1989, 109:19. (English translation of Denki Gakkai Ronbunshi).
    • (1989) Electr. Eng. Jpn. , vol.109 , pp. 19
    • Iida, H.1    Mishuku, T.2    Ito, A.3    Kato, K.4    Hayashi, Y.5
  • 30
    • 77954013028 scopus 로고    scopus 로고
    • Highly transparent and high haze bilayer Al-doped ZnO thin film employing oxygen-controlled seed layer
    • Kang D.W., Kuk S.H., Ji K.S., Ahn S.W., Han M.K. Highly transparent and high haze bilayer Al-doped ZnO thin film employing oxygen-controlled seed layer. Jpn. J. Appl. Phys. 2010, 49:031101.
    • (2010) Jpn. J. Appl. Phys. , vol.49 , pp. 031101
    • Kang, D.W.1    Kuk, S.H.2    Ji, K.S.3    Ahn, S.W.4    Han, M.K.5
  • 31
    • 0034251075 scopus 로고    scopus 로고
    • Transparent p-type conducting oxides: design and fabrication of p-n heterojunctions
    • Kawazoe H., Yanagi H., Ueda K., Hosono H. Transparent p-type conducting oxides: design and fabrication of p-n heterojunctions. MRS Bull. 2000, 25:28.
    • (2000) MRS Bull. , vol.25 , pp. 28
    • Kawazoe, H.1    Yanagi, H.2    Ueda, K.3    Hosono, H.4
  • 32
    • 34547700557 scopus 로고    scopus 로고
    • Structural, electrical and optical properties of indium-tin-oxide thin films prepared by pulsed laser deposition
    • Khodorov A., Piechowiak M., Gomes M.J.M. Structural, electrical and optical properties of indium-tin-oxide thin films prepared by pulsed laser deposition. Thin Solid Films 2007, 515:7829.
    • (2007) Thin Solid Films , vol.515 , pp. 7829
    • Khodorov, A.1    Piechowiak, M.2    Gomes, M.J.M.3
  • 35
    • 0000024838 scopus 로고
    • Electronic conduction of tin oxide thin films prepared by chemical vapor deposition
    • Kojima M., Kato H., Imai A., Yoshida A. Electronic conduction of tin oxide thin films prepared by chemical vapor deposition. J. Appl. Phys. 1988, 64:1902.
    • (1988) J. Appl. Phys. , vol.64 , pp. 1902
    • Kojima, M.1    Kato, H.2    Imai, A.3    Yoshida, A.4
  • 36
    • 79953125659 scopus 로고    scopus 로고
    • Present status and future prospects of silicon thin-film solar cells
    • Konagai M. Present status and future prospects of silicon thin-film solar cells. Jpn. J. Appl. Phys. 2011, 50:030001.
    • (2011) Jpn. J. Appl. Phys. , vol.50 , pp. 030001
    • Konagai, M.1
  • 38
    • 77957971105 scopus 로고    scopus 로고
    • Transparent conducting oxides for electrode applications in light emitting and absorbing devices
    • Liu H., Avrutin V., Izyumskaya N., Özgür Ü., Morkoc H. Transparent conducting oxides for electrode applications in light emitting and absorbing devices. Superlattices Microstruct. 2010, 48:458.
    • (2010) Superlattices Microstruct. , vol.48 , pp. 458
    • Liu, H.1    Avrutin, V.2    Izyumskaya, N.3    Özgür, Ü.4    Morkoc, H.5
  • 40
    • 0347490650 scopus 로고
    • Zinc oxide transparent conducting thin films
    • (in Japanese)
    • Minami T. Zinc oxide transparent conducting thin films. OYO BUTURI 1992, 61:1255. (in Japanese).
    • (1992) OYO BUTURI , vol.61 , pp. 1255
    • Minami, T.1
  • 41
    • 73349095875 scopus 로고    scopus 로고
    • Transparent and conductive multicomponent oxide films prepared by magnetron sputtering
    • Minami T. Transparent and conductive multicomponent oxide films prepared by magnetron sputtering. J. Vac. Sci. Technol. A 1999, 17:1765.
    • (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 1765
    • Minami, T.1
  • 42
    • 0034251174 scopus 로고    scopus 로고
    • New n-type transparent conducting oxides
    • Minami T. New n-type transparent conducting oxides. MRS Bull. 2000, 25:38.
    • (2000) MRS Bull. , vol.25 , pp. 38
    • Minami, T.1
  • 43
    • 17044403452 scopus 로고    scopus 로고
    • Transparent conducting oxide semiconductors for transparent electrodes
    • Minami T. Transparent conducting oxide semiconductors for transparent electrodes. Semicond. Sci. Technol. 2005, 20:S35.
    • (2005) Semicond. Sci. Technol. , vol.20
    • Minami, T.1
  • 44
    • 38649132347 scopus 로고    scopus 로고
    • Substitution of transparent conducting oxide thin films for indium tin oxide transparent electrode applications
    • Minami T. Substitution of transparent conducting oxide thin films for indium tin oxide transparent electrode applications. Thin Solid Films 2008, 516:1314.
    • (2008) Thin Solid Films , vol.516 , pp. 1314
    • Minami, T.1
  • 45
    • 44249118332 scopus 로고    scopus 로고
    • Present status of transparent conducting oxide thin-film development for Indium-Tin-Oxide (ITO) substitutes
    • Minami T. Present status of transparent conducting oxide thin-film development for Indium-Tin-Oxide (ITO) substitutes. Thin Solid Films 2008, 516:5822.
    • (2008) Thin Solid Films , vol.516 , pp. 5822
    • Minami, T.1
  • 46
    • 56949089838 scopus 로고    scopus 로고
    • Present status and future prospects for development of non- or reduced-indium transparent conducting oxide thin films
    • Minami T., Miyata T. Present status and future prospects for development of non- or reduced-indium transparent conducting oxide thin films. Thin Solid Films 2008, 517:1474.
    • (2008) Thin Solid Films , vol.517 , pp. 1474
    • Minami, T.1    Miyata, T.2
  • 47
    • 0016963963 scopus 로고
    • Photoluminescence from Uudoped GaAs under applied electric field: the transition mechanism at high excitation levels near 77K
    • Minami T., Yamanishi M., Kawamura T., Kubo U. Photoluminescence from Uudoped GaAs under applied electric field: the transition mechanism at high excitation levels near 77K. Jpn. J. Appl. Phys. 1976, 15:1117.
    • (1976) Jpn. J. Appl. Phys. , vol.15 , pp. 1117
    • Minami, T.1    Yamanishi, M.2    Kawamura, T.3    Kubo, U.4
  • 48
    • 36749104834 scopus 로고
    • Highly conductive and transparent zinc oxide films prepared by rf magnetron sputtering under an applied external magnetic field
    • Minami T., Nanto H., Takata S. Highly conductive and transparent zinc oxide films prepared by rf magnetron sputtering under an applied external magnetic field. Appl. Phys. Lett. 1982, 41:958.
    • (1982) Appl. Phys. Lett. , vol.41 , pp. 958
    • Minami, T.1    Nanto, H.2    Takata, S.3
  • 49
    • 0021215908 scopus 로고
    • The stability of zinc oxide transparent electrodes fabricated by R.F. magnetron sputtering
    • Minami T., Nanto H., Shooji S., Takata S. The stability of zinc oxide transparent electrodes fabricated by R.F. magnetron sputtering. Thin Solid Films 1984, 111:167.
    • (1984) Thin Solid Films , vol.111 , pp. 167
    • Minami, T.1    Nanto, H.2    Shooji, S.3    Takata, S.4
  • 50
    • 0021428475 scopus 로고
    • Highly conductive and transparent aluminum doped zinc oxide thin films prepared by RF magnetron sputtering
    • Minami T., Nanto H., Takata S. Highly conductive and transparent aluminum doped zinc oxide thin films prepared by RF magnetron sputtering. Jpn. J. Appl. Phys. 1984, 23:L280.
    • (1984) Jpn. J. Appl. Phys. , vol.23
    • Minami, T.1    Nanto, H.2    Takata, S.3
  • 51
    • 0022113847 scopus 로고
    • Optical properties of aluminum doped zinc oxide thin films prepared by RF magnetron sputtering
    • Minami T., Nanto H., Takata S. Optical properties of aluminum doped zinc oxide thin films prepared by RF magnetron sputtering. Jpn. J. Appl. Phys. 1985, 24:L605.
    • (1985) Jpn. J. Appl. Phys. , vol.24
    • Minami, T.1    Nanto, H.2    Takata, S.3
  • 52
    • 0022146289 scopus 로고
    • Group III impurity doped zinc oxide thin films prepared by RF magnetron sputtering
    • Minami T., Sato H., Nanto H., Takata S. Group III impurity doped zinc oxide thin films prepared by RF magnetron sputtering. Jpn. J. Appl. Phys. 1985, 24:L781.
    • (1985) Jpn. J. Appl. Phys. , vol.24
    • Minami, T.1    Sato, H.2    Nanto, H.3    Takata, S.4
  • 53
    • 0004634789 scopus 로고
    • Preparations of ZnO:Al transparent conducting films by d.c. magnetron sputtering
    • Minami T., Oohashi K., Takata S. Preparations of ZnO:Al transparent conducting films by d.c. magnetron sputtering. Thin Solid Films 1990, 193-194:721.
    • (1990) Thin Solid Films , pp. 721
    • Minami, T.1    Oohashi, K.2    Takata, S.3
  • 54
    • 0027107604 scopus 로고
    • Conduction mechanism of highly conductive and transparent zinc oxide thin films prepared by magnetron sputtering
    • Minami T., Sato H., Ohashi K., Tomofuji T., Takata S. Conduction mechanism of highly conductive and transparent zinc oxide thin films prepared by magnetron sputtering. J. Cryst. Growth 1992, 117:370.
    • (1992) J. Cryst. Growth , vol.117 , pp. 370
    • Minami, T.1    Sato, H.2    Ohashi, K.3    Tomofuji, T.4    Takata, S.5
  • 55
    • 0001508683 scopus 로고
    • Highly transparent and conductive zinc-stannate thin films prepared by RF magnetron sputtering
    • Minami T., Sonohara H., Takata S., Sato H. Highly transparent and conductive zinc-stannate thin films prepared by RF magnetron sputtering. Jpn. J. Appl. Phys. 1994, 33:L1693.
    • (1994) Jpn. J. Appl. Phys. , vol.33
    • Minami, T.1    Sonohara, H.2    Takata, S.3    Sato, H.4
  • 56
    • 21844511608 scopus 로고
    • Highly transparent and conductive zinc-stannate thin films prepared by RF magnetron sputtering
    • Minami T., Takata S., Sato H., Sonohara H. Highly transparent and conductive zinc-stannate thin films prepared by RF magnetron sputtering. J. Vac. Sci. Technol. A 1995, 13:1095.
    • (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 1095
    • Minami, T.1    Takata, S.2    Sato, H.3    Sonohara, H.4
  • 63
    • 0032184505 scopus 로고    scopus 로고
    • Work function of transparent conducting multicomponent oxide thin films prepared by magnetron sputtering
    • Minami T., Miyata T., Yamamoto T. Work function of transparent conducting multicomponent oxide thin films prepared by magnetron sputtering. Surf. Coat. Technol. 1998, 108-109:583.
    • (1998) Surf. Coat. Technol. , pp. 583
    • Minami, T.1    Miyata, T.2    Yamamoto, T.3
  • 65
    • 0034226403 scopus 로고    scopus 로고
    • Origin of electrical property distribution on the surface of ZnO:Al films prepared by magnetron sputtering
    • Minami T., Miyata T., Yamamoto T., Toda H. Origin of electrical property distribution on the surface of ZnO:Al films prepared by magnetron sputtering. J. Vac. Sci. Technol. A 2000, 18:1584.
    • (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 1584
    • Minami, T.1    Miyata, T.2    Yamamoto, T.3    Toda, H.4
  • 66
    • 0345324396 scopus 로고    scopus 로고
    • Transparent conducting impurity-co-doped ZnO:Al thin films prepared by magnetron sputtering
    • Minami T., Suzuki S., Miyata T. Transparent conducting impurity-co-doped ZnO:Al thin films prepared by magnetron sputtering. Thin Solid Films 2001, 398-399:53.
    • (2001) Thin Solid Films , pp. 53
    • Minami, T.1    Suzuki, S.2    Miyata, T.3
  • 67
    • 0035556517 scopus 로고    scopus 로고
    • Electrical conduction mechanism of highly transparent and conductive ZnO thin films
    • Minami T., Suzuki S., Miyata T. Electrical conduction mechanism of highly transparent and conductive ZnO thin films. Mater. Res. Soc. Symp. Proc. 2001, 666:F1.3.1.
    • (2001) Mater. Res. Soc. Symp. Proc. , vol.666
    • Minami, T.1    Suzuki, S.2    Miyata, T.3
  • 68
    • 0037009721 scopus 로고    scopus 로고
    • High rate deposition of transparent conducting oxide thin films by vacuum arc plasma evaporation
    • Minami T., Ida S., Miyata T. High rate deposition of transparent conducting oxide thin films by vacuum arc plasma evaporation. Thin Solid Films 2002, 416:92.
    • (2002) Thin Solid Films , vol.416 , pp. 92
    • Minami, T.1    Ida, S.2    Miyata, T.3
  • 69
    • 33646490764 scopus 로고    scopus 로고
    • New transparent conducting Al-doped ZnO film preparation techniques for improving resistivity distribution in magnetron sputtering deposition
    • Minami T., Miyata T., Ohtani Y., Muchizuki Y. New transparent conducting Al-doped ZnO film preparation techniques for improving resistivity distribution in magnetron sputtering deposition. Jpn. J. Appl. Phys. 2006, 45:L409.
    • (2006) Jpn. J. Appl. Phys. , vol.45
    • Minami, T.1    Miyata, T.2    Ohtani, Y.3    Muchizuki, Y.4
  • 70
    • 34547702969 scopus 로고    scopus 로고
    • Effect of thickness on the stability of transparent conducting impurity-doped ZnO thin films in a high humidity environment
    • Minami T., Miyata T., Ohtani Y., Kuboi T. Effect of thickness on the stability of transparent conducting impurity-doped ZnO thin films in a high humidity environment. Phys. Stat. Sol. (RRL) 2007, 1:R31.
    • (2007) Phys. Stat. Sol. (RRL) , vol.1
    • Minami, T.1    Miyata, T.2    Ohtani, Y.3    Kuboi, T.4
  • 71
    • 84858342195 scopus 로고    scopus 로고
    • Effect of thickness on the stability of transparent conducting impurity-doped ZnO thin films in a high humidity environment
    • Minami T., Hirano T., Miyata T., Nomoto J. Effect of thickness on the stability of transparent conducting impurity-doped ZnO thin films in a high humidity environment. Thin Solid Films 2012, 520:3803.
    • (2012) Thin Solid Films , vol.520 , pp. 3803
    • Minami, T.1    Hirano, T.2    Miyata, T.3    Nomoto, J.4
  • 72
    • 84861309629 scopus 로고    scopus 로고
    • Impurity-doped ZnO thin films prepared by physical deposition methods appropriate for transparent electrode applications in thin-film solar cells
    • Minami T., Miyata T., Nomoto J. Impurity-doped ZnO thin films prepared by physical deposition methods appropriate for transparent electrode applications in thin-film solar cells. Mater. Sci. Eng. 2012, 34:012001.
    • (2012) Mater. Sci. Eng. , vol.34 , pp. 012001
    • Minami, T.1    Miyata, T.2    Nomoto, J.3
  • 75
    • 77956737360 scopus 로고    scopus 로고
    • Microstructure and light-scattering properties of ZnO:Al films prepared using a two-step process through the control of oxygen pressure
    • Moon T., Yoon W., Ji K.S., Ahn S.W., Lee S., Joo M., Shin H.Y., Park K., Lee H.M. Microstructure and light-scattering properties of ZnO:Al films prepared using a two-step process through the control of oxygen pressure. Appl. Phys. Express 2010, 3:095801.
    • (2010) Appl. Phys. Express , vol.3 , pp. 095801
    • Moon, T.1    Yoon, W.2    Ji, K.S.3    Ahn, S.W.4    Lee, S.5    Joo, M.6    Shin, H.Y.7    Park, K.8    Lee, H.M.9
  • 76
    • 36048937855 scopus 로고
    • The interpretation of the properties of indium antimonide
    • Moss T.S. The interpretation of the properties of indium antimonide. Proc. Phys. Soc. Lond. B 1954, 67:775.
    • (1954) Proc. Phys. Soc. Lond. B , vol.67 , pp. 775
    • Moss, T.S.1
  • 79
    • 0021370957 scopus 로고
    • Electrical and optical properties of zinc oxide thin films prepared by rf magnetron sputtering for transparent electrode applications
    • Nanto H., Minami T., Shooji S., Takata S. Electrical and optical properties of zinc oxide thin films prepared by rf magnetron sputtering for transparent electrode applications. Jpn. J. Appl. Phys. 1984, 55:1029.
    • (1984) Jpn. J. Appl. Phys. , vol.55 , pp. 1029
    • Nanto, H.1    Minami, T.2    Shooji, S.3    Takata, S.4
  • 81
    • 77954211459 scopus 로고    scopus 로고
    • Resistivity characteristics of transparent conducting impurity-doped ZnO films for use in oxidizing environments at high temperatures
    • Nomoto J., Konagai M., Miyata T., Minami T. Resistivity characteristics of transparent conducting impurity-doped ZnO films for use in oxidizing environments at high temperatures. J. Vac. Sci. Technol. A 2010, 28:861.
    • (2010) J. Vac. Sci. Technol. A , vol.28 , pp. 861
    • Nomoto, J.1    Konagai, M.2    Miyata, T.3    Minami, T.4
  • 82
    • 77649133405 scopus 로고    scopus 로고
    • Comparative study of resistivity characteristics between transparent conducting AZO and GZO thin films for use at high temperatures
    • Nomoto J., Konagai M., Okada K., Ito T., Miyata T., Minami T. Comparative study of resistivity characteristics between transparent conducting AZO and GZO thin films for use at high temperatures. Thin Solid Films 2010, 518:2937.
    • (2010) Thin Solid Films , vol.518 , pp. 2937
    • Nomoto, J.1    Konagai, M.2    Okada, K.3    Ito, T.4    Miyata, T.5    Minami, T.6
  • 83
    • 79960513815 scopus 로고    scopus 로고
    • Optical and electrical properties of transparent conducting B-doped ZnO thin films prepared by various deposition methods
    • Nomoto J., Miyata T., Minami T. Optical and electrical properties of transparent conducting B-doped ZnO thin films prepared by various deposition methods. J. Vac. Sci. Technol. A 2011, 29:041504.
    • (2011) J. Vac. Sci. Technol. A , vol.29 , pp. 041504
    • Nomoto, J.1    Miyata, T.2    Minami, T.3
  • 84
    • 84878125765 scopus 로고    scopus 로고
    • Optical and electrical properties of transparent conducting B-doped ZnO thin films prepared by various deposition methods
    • Nomoto J., Hirano T., Miyata T., Minami T. Optical and electrical properties of transparent conducting B-doped ZnO thin films prepared by various deposition methods. Thin Solid Films 2012, 520:1400.
    • (2012) Thin Solid Films , vol.520 , pp. 1400
    • Nomoto, J.1    Hirano, T.2    Miyata, T.3    Minami, T.4
  • 85
    • 77649098997 scopus 로고    scopus 로고
    • Improvements of spatial resistivity distribution in transparent conducting Al-doped ZnO thin films deposited by DC magnetron sputtering
    • Oda J., Nomoto J., Miyata T., Minami T. Improvements of spatial resistivity distribution in transparent conducting Al-doped ZnO thin films deposited by DC magnetron sputtering. Thin Solid Films 2010, 518:2984.
    • (2010) Thin Solid Films , vol.518 , pp. 2984
    • Oda, J.1    Nomoto, J.2    Miyata, T.3    Minami, T.4
  • 87
    • 0022682909 scopus 로고
    • Electron scattering by impurities in semiconductors
    • Otsuka E. Electron scattering by impurities in semiconductors. Jpn. J. Appl. Phys. 1985, 25:303.
    • (1985) Jpn. J. Appl. Phys. , vol.25 , pp. 303
    • Otsuka, E.1
  • 89
    • 0024705246 scopus 로고
    • Scattering of charge carriers in transparent and conducting thin oxide films with a non-parabolic conduction band
    • Pisarkiewicz T., Zakrzewska K., Leja E. Scattering of charge carriers in transparent and conducting thin oxide films with a non-parabolic conduction band. Thin Solid Films 1989, 174:217.
    • (1989) Thin Solid Films , vol.174 , pp. 217
    • Pisarkiewicz, T.1    Zakrzewska, K.2    Leja, E.3
  • 91
    • 35548977579 scopus 로고    scopus 로고
    • Light localization at randomly textured surfaces for solar-cell applications
    • Rocjstuh C., Lederer F., Bittkau K., Carius R. Light localization at randomly textured surfaces for solar-cell applications. Appl. Phys. Lett. 2000, 91:171104.
    • (2000) Appl. Phys. Lett. , vol.91 , pp. 171104
    • Rocjstuh, C.1    Lederer, F.2    Bittkau, K.3    Carius, R.4
  • 92
    • 0001260525 scopus 로고
    • Band-gap narrowing in heavily defect-doped ZnO
    • Roth A.P., Webb J.B., Williams D.F. Band-gap narrowing in heavily defect-doped ZnO. Phys. Rev. 1982, B25:7836.
    • (1982) Phys. Rev. , vol.B25 , pp. 7836
    • Roth, A.P.1    Webb, J.B.2    Williams, D.F.3
  • 93
    • 34548846658 scopus 로고    scopus 로고
    • Large area ZnO:Al films with tailored light scattering properties for photovoltaic applications
    • Ruske F., Jacobs C., Sittinger V., Szyszka B., Werner W. Large area ZnO:Al films with tailored light scattering properties for photovoltaic applications. Thin Solid Films 2007, 515:8695.
    • (2007) Thin Solid Films , vol.515 , pp. 8695
    • Ruske, F.1    Jacobs, C.2    Sittinger, V.3    Szyszka, B.4    Werner, W.5
  • 96
    • 0027866818 scopus 로고
    • Transparent conducting p-type NiO thin films prepared by magnetron sputtering
    • Sato H., Minami T., Takata S., Yamada T. Transparent conducting p-type NiO thin films prepared by magnetron sputtering. Thin Solid Films 1993, 236:27.
    • (1993) Thin Solid Films , vol.236 , pp. 27
    • Sato, H.1    Minami, T.2    Takata, S.3    Yamada, T.4
  • 97
    • 0037156055 scopus 로고    scopus 로고
    • Highly-conducting indium-tin-oxide transparent films fabricated by spray CVD using ethanol solution of indium (III) chloride and tin (II) chloride
    • Sawada Y., Kobayashi C., Seki S., Funakubo H. Highly-conducting indium-tin-oxide transparent films fabricated by spray CVD using ethanol solution of indium (III) chloride and tin (II) chloride. Thin Solid Films 2002, 409:46.
    • (2002) Thin Solid Films , vol.409 , pp. 46
    • Sawada, Y.1    Kobayashi, C.2    Seki, S.3    Funakubo, H.4
  • 100
    • 0016597193 scopus 로고
    • The electrical properties of polycrystalline silicon films
    • Seto J.Y.W. The electrical properties of polycrystalline silicon films. J. Appl. Phys. 1975, 46:5247.
    • (1975) J. Appl. Phys. , vol.46 , pp. 5247
    • Seto, J.Y.W.1
  • 102
    • 34047266185 scopus 로고    scopus 로고
    • Transition between grain boundary and intragrain scattering transport mechanisms in boron-doped zinc oxide thin films
    • Steinhauser J., Faÿ S., Oliveira N., Vallat-Sauvain E., Ballif C. Transition between grain boundary and intragrain scattering transport mechanisms in boron-doped zinc oxide thin films. Appl. Phys. Lett. 2007, 90:142107.
    • (2007) Appl. Phys. Lett. , vol.90 , pp. 142107
    • Steinhauser, J.1    Faÿ, S.2    Oliveira, N.3    Vallat-Sauvain, E.4    Ballif, C.5
  • 103
    • 0035870352 scopus 로고    scopus 로고
    • Pulsed laser deposition of transparent conducting indium tin oxide films in magnetic field perpendicular to plume
    • Suzuki A., Matsushita T., Aoki T., Yoneyama Y. Pulsed laser deposition of transparent conducting indium tin oxide films in magnetic field perpendicular to plume. Jpn. J. Appl. Phys. 2001, 40:L401.
    • (2001) Jpn. J. Appl. Phys. , vol.40
    • Suzuki, A.1    Matsushita, T.2    Aoki, T.3    Yoneyama, Y.4
  • 105
    • 0022440678 scopus 로고
    • The stability of aluminium-doped ZnO transparent electrodes fabricated by sputtering
    • Takata S., Minami T., Nanto H. The stability of aluminium-doped ZnO transparent electrodes fabricated by sputtering. Thin Solid Films 1986, 135:183.
    • (1986) Thin Solid Films , vol.135 , pp. 183
    • Takata, S.1    Minami, T.2    Nanto, H.3
  • 106
    • 0030219517 scopus 로고    scopus 로고
    • Transparent, conductive CuI films prepared by rf-dc coupled magnetron sputtering
    • Tanaka T., Kawabata K., Hirose M. Transparent, conductive CuI films prepared by rf-dc coupled magnetron sputtering. Thin Solid Films 1996, 281-282:179.
    • (1996) Thin Solid Films , pp. 179
    • Tanaka, T.1    Kawabata, K.2    Hirose, M.3
  • 107
    • 4344639646 scopus 로고    scopus 로고
    • Low resistivity polycrystalline ZnO:Al thin films prepared by pulsed laser deposition
    • Tanaka H., Ihara K., Miyata T., Sato H., Minami T. Low resistivity polycrystalline ZnO:Al thin films prepared by pulsed laser deposition. J. Vac. Sci. Technol. A 2004, 22:1757.
    • (2004) J. Vac. Sci. Technol. A , vol.22 , pp. 1757
    • Tanaka, H.1    Ihara, K.2    Miyata, T.3    Sato, H.4    Minami, T.5
  • 109
    • 42649137956 scopus 로고    scopus 로고
    • High rate direct current magnetron sputtered and texture-etched zinc oxide films for silicon thin film solar cells
    • Tohsophon T., Hüpkes J., Siekmann H., Rech B., Schultheis M., Sirikulrat N. High rate direct current magnetron sputtered and texture-etched zinc oxide films for silicon thin film solar cells. Thin Solid Films 2008, 516:4628.
    • (2008) Thin Solid Films , vol.516 , pp. 4628
    • Tohsophon, T.1    Hüpkes, J.2    Siekmann, H.3    Rech, B.4    Schultheis, M.5    Sirikulrat, N.6
  • 110
    • 0022113552 scopus 로고
    • Influence of energetic oxygen bombardment on conductive ZnO films
    • Tominaga K., Yuasa T., Kume M., Tada O. Influence of energetic oxygen bombardment on conductive ZnO films. Jpn. J. Appl. Phys. 1985, 24:944.
    • (1985) Jpn. J. Appl. Phys. , vol.24 , pp. 944
    • Tominaga, K.1    Yuasa, T.2    Kume, M.3    Tada, O.4
  • 111
    • 0024038627 scopus 로고
    • Radiation effect due to energetic oxygen atoms on conductive Al-doped ZnO films
    • Tominaga K., Kuroda K., Tada O. Radiation effect due to energetic oxygen atoms on conductive Al-doped ZnO films. Jpn. J. Appl. Phys. 1988, 27:1176.
    • (1988) Jpn. J. Appl. Phys. , vol.27 , pp. 1176
    • Tominaga, K.1    Kuroda, K.2    Tada, O.3
  • 114
    • 18244430368 scopus 로고    scopus 로고
    • Hydrogen as a cause of doping in zinc oxide
    • Van de Walle C.G. Hydrogen as a cause of doping in zinc oxide. Phys. Rev. Lett. 2000, 85:1012.
    • (2000) Phys. Rev. Lett. , vol.85 , pp. 1012
    • Van de Walle, C.G.1
  • 116
    • 0022660942 scopus 로고
    • Conductivity imaging of the erosion pattern for ZnO prepared by planar R.F. magnetron sputtering
    • Webb J.B. Conductivity imaging of the erosion pattern for ZnO prepared by planar R.F. magnetron sputtering. Thin Solid Films 1986, 136:135.
    • (1986) Thin Solid Films , vol.136 , pp. 135
    • Webb, J.B.1
  • 117
    • 0001682973 scopus 로고
    • Theory of the band structure of very degenerate semiconductors
    • Wolff P.A. Theory of the band structure of very degenerate semiconductors. Phys. Rev. 1962, 126:405.
    • (1962) Phys. Rev. , vol.126 , pp. 405
    • Wolff, P.A.1
  • 118
    • 0030232243 scopus 로고    scopus 로고
    • Recent developments in RF sputtered cadmium stannate films
    • Wu X., Mulligan W.P., Coutts T.J. Recent developments in RF sputtered cadmium stannate films. Thin Solid Films 1996, 286:274.
    • (1996) Thin Solid Films , vol.286 , pp. 274
    • Wu, X.1    Mulligan, W.P.2    Coutts, T.J.3
  • 119
    • 61449233171 scopus 로고    scopus 로고
    • Effect of thermal annealing on electrical properties of transparent conductive Ga-doped ZnO films prepared by ion-plating using direct-current arc discharge
    • Yamada T., Miyake A., Makimoto H., Yamada N., Yamamoto N., Yamamoto T. Effect of thermal annealing on electrical properties of transparent conductive Ga-doped ZnO films prepared by ion-plating using direct-current arc discharge. Thin Solid Films 2009, 517:3134.
    • (2009) Thin Solid Films , vol.517 , pp. 3134
    • Yamada, T.1    Miyake, A.2    Makimoto, H.3    Yamada, N.4    Yamamoto, N.5    Yamamoto, T.6
  • 120
    • 77954178514 scopus 로고    scopus 로고
    • Ingrain and grain boundary scattering effects on electron mobility of transparent conducting polycrystalline Ga-doped ZnO films
    • Yamada T., Makino H., Yamamoto N., Yamamoto T. Ingrain and grain boundary scattering effects on electron mobility of transparent conducting polycrystalline Ga-doped ZnO films. J. Appl. Phys. 2010, 107:123534.
    • (2010) J. Appl. Phys. , vol.107 , pp. 123534
    • Yamada, T.1    Makino, H.2    Yamamoto, N.3    Yamamoto, T.4
  • 125
    • 0041103061 scopus 로고
    • North-Holland, Amsterdam, p. (Chapter 12), T.S. Moss (Ed.)
    • Zawadzki W. Handbook on Semiconductors 1982, North-Holland, Amsterdam, p. 713 (Chapter 12). T.S. Moss (Ed.).
    • (1982) Handbook on Semiconductors , pp. 713
    • Zawadzki, W.1
  • 128
    • 0037166504 scopus 로고    scopus 로고
    • Electrical and optical properties of tin-doped CdO films deposited by atmospheric metalorganic chemical vapor deposition
    • Zhao Z., Morel D.L., Ferekides C.S. Electrical and optical properties of tin-doped CdO films deposited by atmospheric metalorganic chemical vapor deposition. Thin Solid Films 2002, 413:203.
    • (2002) Thin Solid Films , vol.413 , pp. 203
    • Zhao, Z.1    Morel, D.L.2    Ferekides, C.S.3
  • 129
    • 61449113004 scopus 로고    scopus 로고
    • Aluminium doped zinc oxide sputtered from rotatable dual magnetrons for thin film silicon solar cells
    • Zhu H., Bunte E., Hüpkes J., Siekmann H., Huang S.M. Aluminium doped zinc oxide sputtered from rotatable dual magnetrons for thin film silicon solar cells. Thin Solid Films 2009, 517:3161.
    • (2009) Thin Solid Films , vol.517 , pp. 3161
    • Zhu, H.1    Bunte, E.2    Hüpkes, J.3    Siekmann, H.4    Huang, S.M.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.