Optimization of MEMS capacitive accelerometer

Microsystem Technologies

Volumn 19, Issue 5, 2013, Pages 713-720

  Benmessaoud, Mourad ^a   Nasreddine, Mekkakia Maaza ^a  

^a UNIVERSITÉ DES SCIENCES ET DE LA TECHNOLOGIE D ORAN MOHAMED BOUDIAF   (Algeria)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE ACCELEROMETERS; CAPACITIVE SENSING; DESIGN CONSIDERATIONS; ELECTRO-MECHANICAL; MICROMACHINED ACCELEROMETERS;

COMPUTER SOFTWARE; MATLAB; OPTIMIZATION; SENSITIVITY ANALYSIS;

ACCELEROMETERS;

EID: 84878013380     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-013-1741-z     Document Type: Conference Paper

References (11)

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