Multi-sensor chip for the investigation of different types of metal oxides for the detection of H2O2 in the ppm range

Physica Status Solidi (A) Applications and Materials Science

Volumn 210, Issue 5, 2013, Pages 898-904

  Reisert, Steffen ^a   Schneider, Benno ^a   Geissler, Hanno ^b   Van Gompel, Matthias ^c   Wagner, Patrick ^c   Schöning, Michael J ^a,d  

^a AACHEN UNIVERSITY OF APPLIED SCIENCES   (Germany)

^b SIG Combibloc Systems GmbH   (Germany)

^c HASSELT UNIVERSITY   (Belgium)

^d FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

doped metal oxide; gas sensor; hydrogen peroxide; multi sensor; tin oxide; tungsten oxide

Indexed keywords

FABRICATION PROCESS; METAL OXIDE FILM; METAL OXIDES; MULTI SENSOR; PHYSICAL CHARACTERIZATION; REPRODUCIBILITIES; SENSING PROPERTY; TUNGSTEN OXIDE;

CHEMICAL SENSORS; GAS DETECTORS; HYDROGEN PEROXIDE; METALLIC COMPOUNDS; OXIDE FILMS; PALLADIUM; PEROXIDES; PLATINUM; SCANNING ELECTRON MICROSCOPY; TIN OXIDES; X RAY DIFFRACTION ANALYSIS;

SENSORS;

EID: 84877966389     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.201200930     Document Type: Article

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