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Van Dover, R. B., Lang, D. V., Green, M. L. & Manchanda, L. Crystallization kinetics in amorphous (Zr0.62Al0.38)O1.8 thin films. Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films 19, 2779-2784 (2001). (Pubitemid 33113686)
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(2001)
Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
, vol.19
, Issue.6
, pp. 2779-2784
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Van Dover, R.B.1
Lang, D.V.2
Green, M.L.3
Manchanda, L.4
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