Structural and optical properties of WO 3 sputtered thin films nanostructured by laser interference lithography

Applied Surface Science

Volumn 276, Issue , 2013, Pages 229-235

  Castro Hurtado, I ^a   Tavera, T ^a   Yurrita, P ^a   Perez N ^a   Rodriguez, A ^b   Mandayo, G G ^a   Castano E ^a  

^a TECNUN UNIVERSITY OF NAVARRA   (Spain)

^b CIC MICROGUNE   (Spain)

Author keywords

Laser interference lithography; Nanostructure; Optical band gap

Indexed keywords

ANNEALING; ENERGY GAP; NANOLITHOGRAPHY; NANOSTRUCTURES; OPTICAL BAND GAPS; OPTICAL PROPERTIES; PHASE DIAGRAMS; TUNGSTEN COMPOUNDS;

ANNEALING TEMPERATURES; LASER INTERFERENCE LITHOGRAPHY; LASER INTERFERENCE LITHOGRAPHY (LIL); MORPHOLOGICAL PROPERTIES; OPTICAL ENERGY BAND GAP; PERIODIC NANOSTRUCTURE; RF REACTIVE MAGNETRON SPUTTERING; STRUCTURAL AND OPTICAL PROPERTIES;

THIN FILMS;

EID: 84877585724     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2013.03.072     Document Type: Article

References (40)

1. 3 for electrochromic Solar Energy Materials and Solar Cells 92 2008 245
2. S.K. Deb Opportunities and challenges of electrochromic phenomena in transition metal oxides Solar Energy Materials and Solar Cells 25 1992 327
3. E. Avendaño, L. Berggren, G.A. Niklasson, C.G. Granqvist, and A. Azens Electrochromic materials and devices: brief survey and new data on optical absorption in tungsten oxide and nickel oxide films Thin Solid Films 496 2006 30
4. E. Lassner, and W. Schubert Tungsten Properties, Chemistry, Technology of the Element, Alloys and Chemical Compounds 1999 Luwer Academic/Plenum Publishers New York
5. 3 thin films as an NOx gas sensor Sensors and Actuators B-Chemical 62 2000 102
6. D. Manno, A. Serra, M. Di Giulio, G. Micocci, and A. Tepore Physical and structural characterization of tungsten oxide thin films for NO gas detection Thin Solid Films 324 1998 44
7. 3 on its gas sensing properties VII International Workshop on Semiconductor Gas Sensors Kracow, Poland 2010
8. 3 -based sensors with improved characteristics Sensors and Actuators B-Chemical 140 2009 356
9. 3 for the detection of formaldehyde: cooperative effects Sensors and Actuators B-Chemical 10 1993 99
10. M. Acosta, D. González, and I. Riech Optical properties of tungsten oxide thin films by non-reactive sputtering Thin Solid Films 517 2009 5442
11. A.A. Akl, H. Kamal, and K. Abdel-Hady Characterization of tungsten oxide films of different crystallinity prepared by RF sputtering Physica B 325 2003 65
12. 3 thin films Thin Solid Films 397 2001 238
13. 3 ) thin films Materials Chemistry and Physics 114 2009 475
14. 3 thin films Sensors and Actuators B-Chemical 128 2007 173
15. S. Yamamoto, K. Takano, A. Inouye, and M. Yoshikawa Effects of composition and structure on gasochromic coloration of tungsten oxide films investigated with XRD and RBS Nuclear Instruments & Methods in Physics Research 262 2007 29
16. 2 Sensors and Actuators B-Chemical 137 2009 115
17. 3 sputtered thin films Thin Solid Films 517 2009 2069
18. 3 deposited by modified thermal evaporation for gas-sensing applications Thin Solid Films 490 2005 81
19. A. Rodriguez, M. Echeverría, M. Ellman, N. Perez, Y.K. Verevkin, C.S. Peng, T. Berthou, Z. Wang, I. Ayerdi, J. Savall, and S.M. Olaizola Laser interference lithography for nanoscale structuring of materials: From laboratory to industry Microelectronic Engineering 86 2009 937
20. J. Tauc Amorphous and Liquid Semiconductors 1974 Plenum London (Chapter 4)
21. M. Fox Optical Properties of Solids 2001 Oxford University Press
22. N.W. Ashcroft, and N.D. Mermin Solid State Physics 1976 W.B. Saunders Company Philadelphia
23. 3 thin films Optical Materials 29 2007 679
24. 3 thin films for electrochromic devices Applied Surface Science 153 1999 1
25. N. Subrahamanyan, B. Val, and M. Avadhanalu A Textbook of Optics 2001 Brj Laboratory India
26. A. Al-Ghamdi, W. Mahmoud, S. Yaghmour, and F. Al-Marzouki Structure and optical properties of nanocrystalline NiO thin film synthesized by sol-gel spin-coating method Journal of Alloys and Compounds 486 2009 9
27. J.L. Solis, S. Saukko, L. Kish, C.G. Granqvist, and V. Lantto Semiconductor gas sensors based on nanostructured tungsten oxide Thin Solid Films 391 2001 255
28. M. Stolze, B. Camin, F. Galbert, U. Reinholz, and L.K. Thomas Nature of substoichiometry in reactively DC-sputtered tungsten oxide thin films and its effect on the maximum obtainable colouration by gases Thin Solid Films 409 2002 254
29. 3 and Pd made by advanced reactive gas deposition Sensors and Actuators B-Chemical 105 2005 283
30. B. Zhou, S. Han, R. Raja, and G.A. Somorjai Nanotechnology in Catalysis 2007 Springer New York
31. x thin films Vaccum 66 2002 269
32. S.A. Mahmoud, A.A. Akl, H. Kamal, K. Abdel-Hady, and Opto-structural electrical and electrochromic properties of crystalline nickel oxide thin films prepared by spray pyrolysis Physica B 311 2002 366
33. 3 thin films by MeV N+-ion beam irradiation Journal of Physics-Condensed Matter 19 2007 186204
34. F.P. Koffyberg, K. Dwight, and A. Wold Interband transitions of semiconducting oxides determined from photoelectrolysis spectra Solid State Communications 30 1979 433
35. 3 thin films prepared by electron-beam coating Physica B 391 2007 199
36. 3 thin films grown on flexible substrates by plasma-assisted evaporation technique Applied Physics A-Materials Science & Processing 99 2010 921
37. 3 films Solar Energy Materials and Solar Cells 91 2007 1258
38. 2 sub-micron wires for gas sensors Microelectronic Engineering 78-79 2005 178
39. 3 film prepared with rf sputtering Solar Energy Materials and Solar Cells 91 2007 29
40. 3 from anodized rf sputtered tungsten thin films Electrochemistry Communications 11 2009 768