A new micro jerk sensor with viscous coupling

MHS 2002 - Proceedings of 2002 International Symposium on Micromechatronics and Human Science

Volumn , Issue , 2002, Pages 219-222

  Fujiyoshi, M ^a,b   Nonomura, Y ^a   Arai, F ^b   Fukuda, T ^b  

^a Rd Management Section   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

Acceleration; Circuit noise; Control systems; Fires; Humans; Micromechanical devices; Research and development; Sensor systems; Springs; Viscosity

Indexed keywords

ACCELERATION; CONTROL SYSTEMS; FIRES; SOCIAL SCIENCES; SPRINGS (COMPONENTS); VIBRATORS; VISCOSITY;

CIRCUIT NOISE; HUMANS; MICROMECHANICAL DEVICE; RESEARCH AND DEVELOPMENT; SENSOR SYSTEMS;

MEMS;

EID: 84877226040     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.2002.1058038     Document Type: Conference Paper

References (2)

1. M. Fujiyoshi, Y. Nonomira, et al, "Modeling and Vibration Analysis of Quartz Yaw Rate Sensor to Reduce Mechanical Coupling",Proc. MHS2001,pp105-pp108, (2001)
2. Xia Zhang, "Viscous air damping in laterally driven microresonators", Proc. IEEE Workshop on Micro Electro Mechanical System, pp194-pp204, (1994)