New innovations in MEMS fabrications are responsible for meeting the demand for low-cost inertial sensors for consumer market

Proceedings - 2007 International Symposium on Microelectronics, IMAPS 2007

Volumn , Issue , 2007, Pages 407-412

  Nasiri, Steven ^a  

^a Invensense Inc   (United States)

Author keywords

Gyroscopes; MEMS; Motion sensors; Nasiri fabrication; Rate sensors; Wafer scale integration

Indexed keywords

CONSUMER ELECTRONICS MARKETS; DIGITAL STILL CAMERAS; INTUITIVE USER INTERFACE; MEMS INERTIAL SENSORS; MOTION-SENSORS; NASIRI FABRICATIONS; RATE-SENSORS; WAFER-SCALE-INTEGRATION;

AIR NAVIGATION; COMMERCE; CONSUMER ELECTRONICS; COSTS; GESTURE RECOGNITION; GYROSCOPES; INERTIAL NAVIGATION SYSTEMS; MEMS; MICROELECTRONICS; SENSORS; USER INTERFACES;

FABRICATION;

EID: 84876914542     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. S. Nasiri, "Critical View of MEMS Gyroscope Technology and Commercialization Status," 2003
2. S. Nasiri et al, September 6, 2005, US Patent 6939473 Methods of Making an X-Y dual-axis, Dual-mass Tuning fork Gyroscope With Vertical Integration of Electronics and Wafer Scale Packaging
3. S. Nasiri et al, September 12, 2006, US Patent 7, 104, 129 Vertically integrated MEMS structure with electronics in a hermetically sealed cavity
4. S. Nasiri et al, May 17, 2005, US Patent 6, 892, 575, X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging