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Volumn , Issue , 2001, Pages 180-184
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Static behavior of a piezoelectric micro robot
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Author keywords
Command; Micro positioning; Micro robot; Piezoelectric; Position measurement
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Indexed keywords
DEGREES OF FREEDOM (MECHANICS);
NANOTECHNOLOGY;
PIEZOELECTRICITY;
POSITION MEASUREMENT;
COMMAND;
LONGITUDINAL MOVEMENTS;
MICRO POSITIONING;
MICRO ROBOTS;
PHASE SENSITIVE;
PIEZOELECTRIC;
STATIC BEHAVIORS;
THREE DEGREES OF FREEDOM;
ROBOTS;
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EID: 84876096627
PISSN: 19449399
EISSN: 19449380
Source Type: Journal
DOI: 10.1109/NANO.2001.966415 Document Type: Article |
Times cited : (3)
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References (6)
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