Microscopy Hacks: Development of various techniques to assist quantitative nanoanalysis and advanced electron microscopy

Journal of Electron Microscopy

Volumn 62, Issue 2, 2013, Pages 217-241

  Watanabe, Masashi ^a  

^a Lehigh University   (United States)

Author keywords

factor method; atomic resolution chemical analysis; atomic resolution STEM autotuning; HRTEM coma free alignment; multivariate statistical analysis; quantitative energy filtering method

Indexed keywords

ELECTRON ENERGY LOSS SPECTROSCOPY; METHODOLOGY; MULTIVARIATE ANALYSIS; REVIEW; SCANNING ELECTRON MICROSCOPY; SPECTROMETRY;

MICROSCOPY, ELECTRON, SCANNING; MULTIVARIATE ANALYSIS; SPECTROMETRY, X-RAY EMISSION; SPECTROSCOPY, ELECTRON ENERGY-LOSS;

DATA ACQUISITION; ELECTRON EMISSION; ELECTRON ENERGY LEVELS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON MICROSCOPES; ELECTRONS; ENERGY DISSIPATION; MULTIVARIANT ANALYSIS; SPECTROMETRY; TUNING;

ATOMIC-RESOLUTION; ATOMIC-RESOLUTION CHEMICAL ANALYSE; ATOMIC-RESOLUTION SCANNING TRANSMISSION ELECTRON MICROSCOPE AUTOTUNING; AUTOTUNING; ENERGY FILTERING; FACTOR METHODS; FILTERING METHOD; HRTEM COMA-FREE ALIGNMENT; KEYWORD Ζ-FACTOR METHOD; MULTIVARIATE STATISTICAL ANALYSIS; QUANTITATIVE ENERGY-FILTERING METHOD; RESOLUTION SCANNING; SCANNING TRANSMISSION ELECTRON MICROSCOPES;

TRANSMISSION ELECTRON MICROSCOPY;

EID: 84876017423     PISSN: 00220744     EISSN: 14779986     Source Type: Journal    
DOI: 10.1093/jmicro/dfs085     Document Type: Review

References (69)

1. Hawks P W ed. (2008) Advances in Imaging and Electron Physics, Vol. 153 Imaging And Electron Physics Aberration-Corrected Electron Microscopy (Elsevier, New York).
2. Pennycook S J and Nellist P D eds (2011) Scanning Transmission Electron Microscopy: Imaging and Analysis, (Springer, New York).
3. http://en.wikipedia.org/wiki/Life-hack.
4. Caplan J (2007) Time, Issue on June 21st (http://www.time.com/time/ magazine/article/0,9171,1635844,00.html).
5. Williams D B and Carter C B (2009) Transmission Electron Microscopy: A Textbook for Materials Science. 2nd ed. (Springer, New York).
6. Cliff G and Lorimer G W (1975) The quantitative analysis of thin specimens. J. Microsc. 103: 203-207.
7. Goldstein J I, Costley J L, Lorimer G W, and Reed R J B (1977) Quantitative X-ray analysis in the electron microscope. In: Johari O (ed.), Scanning Electron Microscopy - 1977, Vol. 1, pp 315-324 (IITRI, Chicago, IL).
8. Watanabe M, Horita Z, and Nemoto M (1996) Absorption correction and thickness determination using ζ-factor in quantitative X-ray microanalysis. Ultramicroscopy 65: 187-198. (Pubitemid 26400395)
9. Watanabe M and Williams D B (2003) Quantification of elemental segregation to lath and grain boundaries in low-alloy steel by STEM X-ray mapping combined with the ζ-factor method. Z. Metallk. 94: 307-316.
10. Watanabe M and Williams D B (2006) The quantitative analysis of thin specimens: a review of progress from the Cliff-Lorimer to the new α-factor methods. J. Microsc. 221: 89-109. (Pubitemid 43341275)
11. Van Cappellan E and Schmitz A (1992) A simple spot-size versus pixel-size criterion for X-ray microanalysis of thin foils. Ultramicroscopy 41: 193-199.
12. Doig P, Lonsdale D, and Flewitt P E J (1980) The detection of monolayer grain boundary segregation in steels using STEM-EDS X-ray microanalysis. Philos. Mag. A 41: 761-775.
13. Alber U, Müllejans H, and Rühle M (1997) Improved quantification of grain boundary segregation by EDS. Ultramicroscopy 69: 105-116. (Pubitemid 27418143)
14. Goldstein J I, Newbury D E, Joy D C, Lyman C E, Echlin P, Lifshin E, Sawyer L, and Michael J R (2003) Scanning Electron Microscopy and X-ray Microanalysis, 2nd ed., (Kluwer/Plenum, New York).
15. Horita Z, Sano T, and Nemoto M (1987) Simplification of X-ray absorption correction in thin-sample quantitative microanalysis. Ultramicroscopy 21: 271-276. (Pubitemid 17606349)
16. Horita Z, Ichitani K, Sano T, and Nemoto M (1989) Application of the differential X-ray absorption method to the determinations of foil thickness and local composition in the analytical electron microscope. Phil. Mag. A 59: 939-952. (Pubitemid 20595003)
17. Morris P L, Ball M D, and Statham P J (1980) The correction of thin foil microanalysis data for X-ray absorption effect. Mulvey T (ed.), Developments in Electron Microscopy and Analysis, pp 413-416 (Institute of Physics, London).
18. Egerton R F (2011) Electron Energy-Loss Spectroscopy in the Electron Microscope, 3rd ed., (Plenum, New York).
19. Craven A J, MacKenzie M, and McFadzean S (2008) Dual energy range EELS spectrum imaging using a fast beam switch. Proceedings EMC 2008, Vol. 1, pp 363-364 (Springer, Verlag, Germany).
20. Watanabe M and Allen F I (2012) The SmartEFTEM-SI method: Development of a new spectrum-imaging acquisition scheme for quantitative mapping by energy-filtering transmission electron microscopy. Ultramicroscopy 113: 106-119.
21. Watanabe M, Cubero JM, Edalati K, and Horita Z (2011) Distribution measurement of nanoscale secondary phases by newly developed rotation dark-filed imaging. Microsc. Microanal. 17: 1104-1105.
22. Yao B, Sun T, Warren A, Heinrich H, Barmak K, and Coffey K R (2010) High contrast hollow-cone dark field transmission electron microscopy for nanocrystalline grain size quantification. Micron 41: 177-182.
23. Wang Z L (1994) Dislocation contrast in high-angle hollow-cone dark-field TEM. Ultramicroscopy 53: 73-90. (Pubitemid 24066498)
24. Yao B, Heinrich H, Smith C, van den Bergh M, Cho K, and Sohn Y (2011) Hollow-cone dark-field transmission electron microscopy for dislocation density characterization of trimodal Al composites. Micron 42: 29-35.
25. Ristau R A, Hofer F, Barmak K, Coffey K R, and Howard J K (1998) An EFTEM and conical dark field investigation of co-sputtered CoPt +Yttria stabilized zirconia thin films. Micron 29: 33-41. (Pubitemid 28219796)
26. Bettles C J and Rossouw C J (2000) Detection of Au precipitates in a Mg-based alloy using electronically simulated hollow cone illumination. Micron 31: 651-657. (Pubitemid 30390824)
27. Edalati K, Matsubara E, and Horita Z (2009) Processing pure Ti by high-pressure torsion in wide ranges of pressures and strain. Metall. Mater. Trans. 40A: 2079-2086.
28. Watanabe M, Okunishi E, and Ishizuka K (2009) Analysis of spectrum- imaging datasets in atomic-resolution electron microscopy. Microscopy and Analysis 23: 5-7.
29. Jolliffe I T (2002) Principal Component Analysis, 2nd ed., (Springer, New York).
30. Malinowski E R (2002) Factor Analysis in Chemistry, 3rd ed., (Wiley, New York).
31. Kotula P G, Keenan M R, and Michael J R (2003) Automated analysis of SEM X-ray spectral images: a powerful new microanalysis tool. Microsc. Microanal. 9: 1-17. (Pubitemid 36280847)
32. Enache D I, Edwards J, Landon P, Solsona-Espriu B, Carley A F, Herzing A A, Watanabe M, Kiely C J, Knight D W, and Hutchings G J (2006) Solvent-free oxidation of primary alcohols to aldehydes using titania-supported gold-palladium catalysts. Science. 311: 362-365. (Pubitemid 43132657)
33. Bosman M, Watanabe M, Alexander D T L, and Keast V J (2006) Mapping chemical and bonding information using multivariate analysis of electron energy-loss spectrum images. Ultramicroscopy 106: 1024-1032. (Pubitemid 44485340)
34. Bosman M, Keast V J, Watanabe M, Maaroof A I, and Cortie M B (2007) Mapping surface plasmons at the nanometre scale with an electron beam. Nanotechnology 18: 165505.
35. Herzing A A, Watanabe M, Edwards J K, Conte M, Tang Z-R, Hutchings G J, and Kiely C J (2008) Energy dispersive X-ray spectroscopy of bimetallic nanoparticles in an aberration corrected scanning transmission electron microscope. Faraday Discuss. 138: 337-351.
36. Bosman M, Keast V J, Watanabe M, McCulloch D G, Shakerzadeh M, Teo E H T, and Tay B K (2009) Quantitative, nanoscale mapping of sp2 percentage and crystal orientation in carbon multilayers. Carbon 47: 94-101.
37. Bosman M, Keast V J, García-Muñoz J L, D'Alfonso A J, Findlay S D, and Allen L J (2007) Two-dimensional mapping of chemical information at atomic resolution. Phys. Rev. Lett. 99: 086102.
38. Watanabe M, Kanno M, Ackland D W, Kiely C J, and Williams D B (2007) Applications of electron energy-loss spectrometry and energy filtering in an aberration-corrected JEM-2200FS STEM/TEM. Microsc. Microanal. 13: 1264-1265.
39. Varela M, Oxley M P, Luo W, Tao J, Watanabe M, Lupini A R, Pantelides S T, and Pennycook S J (2009) Atomic resolution imaging of oxidation states in manganites. Phys. Rev. B 79: 085117.
40. http://www.hremresearch.com/Eng/plugin/MSAEng.html.
41. http://www.lehigh.edu/~maw3/msh/msamain.html.
42. Watanabe M, Kanno M, and Okunishi E (2010) Atomic-resolution elemental mapping by EELS and XEDS in aberration corrected STEM. JEOL News 45: 8-15.
43. Kimoto K, Ishizuka K, and Matsui K (2008) Decisive factors for realizing atomic-column resolution using STEM and EELS. Micron 39: 653-657.
44. von Harrach H S, Dona P, Freitag B, Soltau H, iculae A, and Rohde M (2009) An integrated silicon drift detector system for FEI Schottky field emission transmission electron microscopes. Microsc. Microanal. 15: 208-209.
45. www.jeol.com.
46. Watanabe M, Yasuhara A, and Okunishi E (2012) Quantitative analysis of atomic-resolution X-ray maps in an aberration-corrected scanning transmission electron microscope with a large solid-angle detector. Microsc. Microanal. 15(Suppl 2): 974-975.
47. Bullock J F, Humphreys C J, Mace A J W, Bishop H E, and Titchmarsh J M (1985) Crystalline effects in the analysis of semiconductor materials using Auger electrons and X-rays. In: Gullis A G and Holt D B (eds.), Microscopy in Semiconductor Materials 1985, pp 405-410 (Adam Hilger, Bristol). (Pubitemid 17542761)
48. Forbes B D, D'lfonso A J, Williams R E A, Srinivasan R, Fraser H L, McComb D W, Freitag B, Klenov D O, and Allen L J (2012) Contribution of thermally scattered electrons to atomic resolution elemental maps. Phys. Rev. B 86: 024108.
49. Yaguchi T, Konno M, Kamino T, and Watanabe M (2008) Observation of three-dimensional elemental distributions of a Si-device using a 360-degree-rotation FIB/STEM system. Ultramicroscopy 108: 1603-1615.
50. Egerton R F and Cheng S C (1994) The use of NiO test specimens in analytical electron microscopy. Ultramicroscopy 55: 43-54. (Pubitemid 24270836)
51. Bennett J C and Egerton R F (1995) NiO test specimen for analytical electron microscopy: round-robin results. J. Microsc. Soc. Am. 1: 143-149.
52. Wong K and Egerton R F (1995) The Performance of Analytical Electron Microscopes and EDX Systems, Measured with a Nickel Oxide Test Specimen. Proceedings of Microscopy and Microanalysis 1995, pp 600-601 (Jones and Begell Publishing, New York).
53. Watanabe M (2010) XUtils Ver. 1: A set of Gatan DigitalMicrograph plug-ins for characterization of XEDS-detector performance parameters in an AEM. Microsc. Microanal. 16: 260-261.
54. Watanabe M (2011) Applications of thin-film standards in analytical electron microscopy. Microsc. Microanal. 17: 862-863.
55. Lyman C E, Goldstein J I, Williams D B, Ackland D W, von Harrach S, Nicholls A W, and Statham P J (1994) High-performance X-ray detection in a new analytical electron microscope. J. Microsc. 176: 85-98.
56. Watanabe M (2009) XUtils - X-ray analysis utilities for Gatan DigitalMicrograph, available from Department of Materials Science & Engineering, Lehigh Univeristy, Bethlehem, PA18015 (http://www.lehigh.edu/~maw3/ msh/xutilmain.html).
57. Smith D J, Saxton W O, O'Keefe M A, Wood G J, and Stobbs W M (1983) High-performance X-ray detection in a new analytical electron microscope. Ultramicroscopy 11: 263-281.
58. Zemlin F, Weiss K, Schiske P, Kunath W, and Herrmann K-H (1978) Coma-free alignment of high resolution electron microscopes with the aid of optical diffractograms. Ultramicroscopy 3: 49-60. (Pubitemid 9164298)
59. Zemlin F (1979) A practical procedure for alignment of a high resolution electron microscope. Ultramicroscopy 4: 241-245. (Pubitemid 9216631)
60. Krivanek O L and Mooney P E (1993) Applications of slow-scan CCD cameras in transmission electron microscopy. Ultramicroscopy 49: 95-108.
61. Ishizuka K (1994) Coma-free alignment of a high-resolution electron microscope with three-fold astigmatism. Ultramicroscopy 55: 407-418. (Pubitemid 24339885)
62. Watanabe M (2012) mwComaFree - HRTEM coma-free alignment for Gatan DigitalMicrograph, available from Department of Materials Science & Engineering, Lehigh Univeristy, Bethlehem, PA18015. (http://www.lehigh.edu/ ~maw3/msh/cmfmain.html).
63. Haider M, Uhlemann S, and Zach J (2000) Upper limits for the residual aberrations of a high-resolution aberration-corrected STEM. Ultramicroscopy 81: 163-175. (Pubitemid 30176017)
64. Dellby N, Krivanek O L, Nellist P D, Batson P E, and Lupini A R (2001) Progress in aberration-corrected scanning transmission electron microscopy. J. Electron Microscopy 50: 177-185. (Pubitemid 32635566)
65. Sawada H, Sannomiya T, Hosokawa F, Nakamichi T, Kaneyama T, Tomita T, Kondo Y, Tanaka T, Oshima Y, Tanishiro Y, and Takayanagi K (2008) Measurement method of aberration from Ronchigram by autocorrelation function. Ultramicroscopy 108: 1467-1475.
66. Sawada H, Watanabe M, Okunishi E, and Kondo Y (2011) Autotuning of aberrations using high-resolution STEM images by autocorrelation function. Microsc. Microanal. 17(Suppl. 2): 1308-1309.
67. Sawada H, Watanabe M, and Chiyo I. (2012) Ad hoc auto-tuning of aberrations using high-resolution STEM images by autocorrelation function. Microsc. Microanal. 18: 705-710.
68. Sawada H and Watanabe M (2012) Development of an Ad-Hoc aberration auto-tuning procedure on an oriented crystalline specimen in aberration-corrected scanning transmission electron microscopy: the SIAM Method. Microsc. Microanal. 18(Suppl 2): 334-335.
69. Momma K and Izumi F (2011) VESTA 3 for three-dimensional visualization of crystal, volumetric and morphology data. J. Appl. Crystallogr. 44: 1272-1276.