Low voltage PZT actuated tilting micromirror with hinge structure

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 89-90

  Nam, Hyo Jin ^a   Kim, Young Sik ^a   Cho, Seong Moon ^a   Yee, Yougjoo ^a   Bu, Jong Uk ^a   Kim, Sung Jin ^b   Cho, Young Ho ^b  

^a LG Electronics Inc   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

MOEMS;

BULK-MICROMACHINED; DEGREE OF FREEDOM; LOW VOLTAGE OPERATION; MECHANICAL CONSTRAINTS; MICRO MIRROR; OPTICAL APPLICATIONS; PZT CANTILEVERS; TILTING ANGLE;

DEGREES OF FREEDOM (MECHANICS);

EID: 84875431325     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031457     Document Type: Conference Paper

References (3)

1. th Optical Fiber Comm. Conf., Baltimore, MD, Mar. 2000.
2. W.M. Lin et al., MOEMS 1999, Mainz, Germany, Set. 1999, pp. 21-26.
3. Y. Yee et al., Proc. MEM S2001, Interlaken, Switzerland, Jan. 2001, pp. 317-320.