LTCC gas flow detector

16th European Microelectronics and Packaging Conference and Exhibition 2007, EMPC 2007

Volumn , Issue , 2007, Pages 159-162

  Jurków, Dominik ^a   Golonka, Leszek J ^a   Roguszczak, Henryk ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Detector; Flow; Gas; LTCC

Indexed keywords

FLOW; LOW-TEMPERATURE CO-FIRED CERAMICS; LTCC; NEW CONSTRUCTIONS; OPTICAL COMPONENTS; PRELIMINARY DESIGN; SACRIFICIAL LAYER; TRANSPARENT POLYMER;

AXLES; EXHIBITIONS; FLOW OF GASES; GASES; MICROELECTRONICS; OPTICAL ENGINEERING; TURBINES;

DETECTORS;

EID: 84875281312     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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