ULE® Glass for EUVL applications, a fictive temperature correlation

Journal of Non-Crystalline Solids

Volumn 367, Issue 1, 2013, Pages 37-42

  Carapella, A P ^a   Duran, C A ^a   Hrdina, K E ^a   Sears, D J ^a   Tingley, J E ^a  

^a Corning Incorporated ^*  (United States)

Author keywords

EUVL; Fictive temperature; Silica; Titania; ULE Glass

Indexed keywords

FICTIVE TEMPERATURES; PEAK POSITION; ROOM TEMPERATURE; TIO; TITANIA; TITANIA CONTENT;

EXTREME ULTRAVIOLET LITHOGRAPHY; FUSED SILICA; GLASS; SILICA;

TITANIUM DIOXIDE;

EID: 84874866051     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2013.01.052     Document Type: Article

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