Microfabrication of air core power inductors with metal-encapsulated polymer vias

Journal of Micromechanics and Microengineering

Volumn 23, Issue 3, 2013, Pages

  Kim, Jungkwun ^a   Herrault, Florian ^a   Yu, Xuehong ^a   Kim, Minsoo ^a   Shafer, Richard H ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EXTERNAL SURFACES; FINITE ELEMENT SIMULATIONS; HIGH ASPECT RATIO; INDUCTOR WINDINGS; SACRIFICIAL LAYER; THREEDIMENSIONAL (3-D); TOROIDAL INDUCTORS; VIA INTERCONNECTION;

ASPECT RATIO; ELECTRIC INDUCTORS; MICROFABRICATION; POWER ELECTRONICS; WINDING;

POLYMERS;

EID: 84874610077     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/3/035006     Document Type: Article

References (23)

1. Li Q, Lim M, Sun J, Ball A, Ying Y, Lee F and Ngo K 2010 Technology road map for high frequency integrated DC-DC converter Applied Power Electronics Conf. and Exposition (APEC) pp 533-9
2. Lee C, Choi H, Kim Y and Kim N 2011 A low-power CMOS DC-DC buck converter with on-chip stacked spiral inductor Microelectron. Int. 28 38-43
3. Prabhakaran S, Sun Y, Dhagat P, Li W and Sullivan C 2005 Microfabricated V-groove power inductors for high-current low-voltage fast-transient dc-dc converters IEEE Power Electronics Specialists Conf. 1513-9 (Pubitemid 46379376)
4. Sullivan C and Sanders S Design of microfabricated transformers and inductors for high-frequency power conversion IEEE Trans. Power Electron. 11 228-38
5. O'Donnell T, Wang N, Meere R, Rhen F, Roy S, O'Sullivan D and O'Mathuna C 2008 Microfabricated inductors for 20 MHz dc-dc converters IEEE Applied Power Electronics Conf. and Exposition pp 689-93
6. Meyer C, Bedair S, Morgan B and Arnold D 2010 High-inductance-density, air-core, power inductors, and transformers designed for operation at 100-500 MHz IEEE Trans. Magn. 46 2236-9
7. Yoon T, Cho W and Kim C 2000 Fabrication of meander and spiral type micro inductors J. Mater. Sci. Technol. 16 236-7
8. Nakazawa H, Edo M, Katayama Y, Gekinozu M, Sugahara S, Hayashi Z, Kuroki K, Yonezawa E and Matsuzaki K 2000 Micro-DC/DC converter that integrates planar inductor on power IC IEEE Trans. Magn. 36 3518-20 (Pubitemid 32384906)
9. Fukuda Y, Inoue T, Mizoguchi T, Yatabe S and Tachi Y 2003 Planar inductor with ferrite layers for DC-DC converter IEEE Trans. Magn. 39 2057-61
10. Takeuchi A, Okazaki S, Kobayashi H, Sugawa Y, Takeshima A, Sonehara M, Matsushita N and Sato T 2011 Fabrication of planar power inductor for embedded passives in LSI package for hundreds megaherts switching DC-DC buck converter IEEE Trans. Magn. 47 3204-7
11. Cheng K and Evans P 1994 Calculation of winding losses in high-frequency toroidal inductors using single strand conductors IEEE Electr. Power Appl. 141 52-62
12. Orlando B, Royet A and Viala B 2006 Fast analysis of proximity effects in integrated inductors with high permeability magnetic material IEEE Trans. Magn. 42 3371-3 (Pubitemid 46179688)
13. Kuhn W and Ibrahim N 2001 Analysis of current crowding effects in multiturn spiral inductors IEEE Trans. Microw. Theory Tech. 49 31-8 (Pubitemid 32873809)
14. Vandi L, Andreani P, Temporiti E, Sacchi E, Bietti I, Ghezzi C and Castello R 2007 A toroidal inductor integrated in a standard cmos process Analog Integr. Circuits Signal Process. 50 39-46 (Pubitemid 44916533)
15. Orlandi S, Allongue B, Blanchot G, Buso S, Faccio F, Fuentes C, Kayal M, Michelis S and Spiazzi G 2011 Optimization of shielded pcb air-core toroids for high efficiency dc-dc converters IEEE Trans. Power Electron. 26 1837-46
16. Yu X, Kim M, Herrault F, Ji C, Kim J and Allen M 2012 Silicon-embedded 3D toroidal air-core inductor with through-wafer interconnect for on-chip integration IEEE Micro Electro Mechanical Systems Conf. pp 325-8
17. Orlando B, Hida R, Cuchet R, Audoin M, Viala B, Pellissier-Tanon D, Gagnard X and Ancey P 2006 Low-resistance integrated toroidal inductor for power management IEEE Trans. Magn. 42 3374-6
18. Sullivan C, Li W, Prabhakaran S and Lu S 2007 Design and fabrication of low-loss toroidal air-core inductors IEEE Power Electronics Specialists Conf. pp 1754-9
19. Lu H, Pillans B, Lee J and Lee J 2005 High aspect ratio air core solenoid inductors using improved UV-LIGA process with contrast enhancement material Microsyst. Technol. 13 237-43 (Pubitemid 46012814)
20. Yoon Y, Park J and Allen M 2005 Polymer-core conductor approaches for RF MEMS J. Microelectromech. Syst. 14 886-94 (Pubitemid 41555280)
21. Johnson D, Vogt A, Ahrens G and Dai W 2010 Thick epoxy resist sheets for MEMS manufacturing and packaging IEEE MEMS 2010 (Hong Kong,) pp 412-5
22. Kim J, Allen M and Yoon Y 2011 Computer controlled dynamic mode multidirectional UV lithography for 3-D microfabrication J. Micromech. Microeng. 21 035003
23. Chung C and Allen M 2005 Uncrosslinked SU-8 as a sacrificial material J. Micromech. Microeng. 15 1-5