SCOPUS 정보 검색 플랫폼

Volumn 529, Issue , 2013, Pages 50-53

Effect of oxygen to argon flow ratio on the properties of Al-doped ZnO films for amorphous silicon thin film solar cell applications

(8) Lin, Yang Shih a Lien, Shui Yang b Huang, Yung Chuan b Wang, Chao Chun a Liu, Chueh Yang b Nautiyal, Asheesh c Wuu, Dong Sing a Lee, Shuo Jun c

a NATIONAL CHUNG HSING UNIVERSITY (Taiwan)

b MINGDAO UNIVERSITY (Taiwan)

c YUAN ZE UNIVERSITY (Taiwan)

Author keywords

Aluminum doped zinc oxide; Radiofrequency magnetron sputtering; Solar cell; Transparent conductive oxide

Indexed keywords

AL-DOPED ZNO FILMS; ALUMINUM-DOPED ZINC OXIDE; AMORPHOUS SILICON THIN FILMS; ARGON FLOW; AZO THIN FILMS; CURRENT VOLTAGE; EFFECT OF OXYGEN; ELECTRICAL RESISTIVITY; EXTERNAL QUANTUM EFFICIENCY; FLOW RATIOS; HIGH CONDUCTIVITY; IN-VACUUM; MICRO-STRUCTURAL; RADIO FREQUENCY MAGNETRON SPUTTERING; SOLAR CELL DEVICES; SOLAR CELL FABRICATION; TRANSPARENT CONDUCTIVE OXIDE THIN FILM; TRANSPARENT CONDUCTIVE OXIDES;

ALUMINUM; ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; THIN FILMS; ZINC OXIDE;

SOLAR CELLS;

EID: 84873742521 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2012.07.070 Document Type: Conference Paper

Times cited : (8)

References (13)

1
- 33846400449
- J.H. Park, J.M. Shin, S.Y. Cha, J.W. Park, S.Y. Jeong, H.K. Pak, and C.R. Cho J. Korean Phys. Soc. 49 2006 S584
- (2006) J. Korean Phys. Soc. , vol.49 , pp. 584
- Park, J.H.¹ Shin, J.M.² Cha, S.Y.³ Park, J.W.⁴ Jeong, S.Y.⁵ Pak, H.K.⁶ Cho, C.R.⁷

2
- 0035335158
- M. Chen, Z.L. Pei, X. Wang, C. Sun, and L.S. Wang J. Vac. Sci. Technol. A 19 2001 963
- (2001) J. Vac. Sci. Technol. A , vol.19 , pp. 963
- Chen, M.¹ Pei, Z.L.² Wang, X.³ Sun, C.⁴ Wang, L.S.⁵

3
- 0345324396
- T. Minami, S. Suzuki, and T. Miyata Thin Solid Films 398 2001 53
- (2001) Thin Solid Films , vol.398 , pp. 53
- Minami, T.¹ Suzuki, S.² Miyata, T.³

4
- 1342281325
- S.H. Jeong, and J.H. Boo Thin Solid Films 447 2004 105
- (2004) Thin Solid Films , vol.447 , pp. 105
- Jeong, S.H.¹ Boo, J.H.²

5
- 77950519959
- J.J. Ding, H.X. Chen, and S.Y. Ma Appl. Surf. Sci. 256 2010 4304
- (2010) Appl. Surf. Sci. , vol.256 , pp. 4304
- Ding, J.J.¹ Chen, H.X.² Ma, S.Y.³

6
- 0035501114
- J.M. Ting, and B.S. Tsai Mater. Chem. Phys. 72 2001 273
- (2001) Mater. Chem. Phys. , vol.72 , pp. 273
- Ting, J.M.¹ Tsai, B.S.²

7
- 76849083737
- C. Guillén, and J. Herrero Vacuum 84 2010 924
- (2010) Vacuum , vol.84 , pp. 924
- Guillén, C.¹ Herrero, J.²

8
- 27944448489
- X. Chen, W. Guan, G. Fang, and X.Z. Zhao Appl. Surf. Sci. 252 2005 1561
- (2005) Appl. Surf. Sci. , vol.252 , pp. 1561
- Chen, X.¹ Guan, W.² Fang, G.³ Zhao, X.Z.⁴

9
- 21644477594
- J. Hu, and R.G. Gordon J. Appl. Phys. 71 1992 880
- (1992) J. Appl. Phys. , vol.71 , pp. 880
- Hu, J.¹ Gordon, R.G.²

10
- 0031212013
- K.C. Park, D.Y. Ma, and K.H. Kim Thin Solid Films 305 1997 201
- (1997) Thin Solid Films , vol.305 , pp. 201
- Park, K.C.¹ Ma, D.Y.² Kim, K.H.³

11
- 33645236960
- W.J. Jeong, S.K. Kim, and G.C. Park Thin Solid Films 506 2006 180
- (2006) Thin Solid Films , vol.506 , pp. 180
- Jeong, W.J.¹ Kim, S.K.² Park, G.C.³

12
- 77956880305
- S.Y. Lien, C.C. Wang, C.T. Shen, Y.C. Ou, Y.S. Cho, K.W. Weng, C.H. Chao, C.F. Chen, and D.S. Wuu Thin Solid Films 518 2010 7233
- (2010) Thin Solid Films , vol.518 , pp. 7233
- Lien, S.Y.¹ Wang, C.C.² Shen, C.T.³ Ou, Y.C.⁴ Cho, Y.S.⁵ Weng, K.W.⁶ Chao, C.H.⁷ Chen, C.F.⁸ Wuu, D.S.⁹

13
- 84866351141
- D.K. Kima, and H.B. Kimb J. Alloys Compd. 522 2012 69
- (2012) J. Alloys Compd. , vol.522 , pp. 69
- Kima, D.K.¹ Kimb, H.B.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.