Ultra-trace micro gas analysis system of ammonia in cleanroom

Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007

Volumn , Issue , 2007, Pages 1450-1452

  Uchiyama, Kenji ^a   Sasaki, Mari ^a   Kihira, Yuko ^a   Kuriyama, Katsumi ^a   Kikutani, Yoshikuni ^b   Mawatari, Kazuma ^b   Kitamori, Takehiko ^c  

^a Institute of Microchemical Technology Co Ltd   (Japan)

^b KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

Ammonia gas; Laminar flow; Multi phase flow; Thermal lens microscope

Indexed keywords

AMMONIA; CLEAN ROOMS; LABORATORIES; LAMINAR FLOW;

COLORIMETRIC REACTION; DETECTION LIMITS; DETECTION PROCESS; FLUORESCENT MOLECULES; MICRO GAS ANALYSIS; SEMICONDUCTOR PROCESS; THERMAL LENS MICROSCOPE; ULTRA SENSITIVES;

GASES;

EID: 84873437853     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. M. Tokeshi, et al., Gas-Liquid Phase Micro Unit Operations Using Two-phase Flow and Its Applications for Chemical Process, Proc. Micro Total Analysis Systems 2004, Kluwer Academic Publisher, Dordrecht, The Netherlands, pp. 246-248, (2004).