Unlocking doping and compositional profiles of nanowire ensembles using SIMS

Nanotechnology

Volumn 24, Issue 4, 2013, Pages

  Chia, A C E ^a   Boulanger, J P ^a   Lapierre, R R ^a  

^a MCMASTER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CYCLOTENE; DEPTH RESOLUTION; DOPANT CONCENTRATIONS; DOPING DENSITIES; SPACE BETWEEN; TIME OF FLIGHT; TOP SURFACE;

SECONDARY ION MASS SPECTROMETRY;

NANOWIRES;

NANOTUBE;

ARTICLE; CHEMISTRY; MASS SPECTROMETRY; MATERIALS TESTING; METHODOLOGY; ULTRASTRUCTURE;

MATERIALS TESTING; NANOTUBES; SPECTROMETRY, MASS, SECONDARY ION;

MLCS; MLOWN;

EID: 84872148832     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/24/4/045701     Document Type: Article

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