Sub-μm josephson junctions for superconducting quantum devices

IEEE Transactions on Applied Superconductivity

Volumn 23, Issue 3, 2013, Pages

  Meckbach, J M ^a   Merker, M ^a   Buehler, S J ^a   Ilin, K ^a   Neumeier, B ^b   Kienzle, U ^b   Goldobin, E ^b   Kleiner, R ^b   Koelle, D ^b   Siegel, M ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

Josephson junctions (JJs); SIS mixers

Indexed keywords

CONVENTIONAL PHOTOLITHOGRAPHY; FABRICATION PROCESS; FLAT SURFACES; HIGH QUALITY; JOSEPHSON JUNCTIONS; JOSEPHSON VORTICES; LATERAL DIMENSION; LATERAL SIZES; MIX-AND-MATCH; MULTILAYER PROCESS; PROCESS YIELD; QUALITY PARAMETERS; QUANTUM DEVICE; SIS MIXERS; STEP HEIGHT; TRANSPORT MEASUREMENTS;

CHEMICAL MECHANICAL POLISHING; ELECTRON BEAM LITHOGRAPHY; FABRICATION; MIXER CIRCUITS; PHOTOLITHOGRAPHY; QUANTUM THEORY; SUPERCONDUCTIVITY;

JOSEPHSON JUNCTION DEVICES;

EID: 84872103390     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2012.2231719     Document Type: Article

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