Development of micro-vibrating flow pumps using MEMS technologies

Microfluidics and Nanofluidics

Volumn 13, Issue 5, 2012, Pages 703-713

  Osman, Osman Omran ^a   Shintaku, Hirofumi ^a   Kawano, Satoyuki ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

MEMS; Micro PIV; Micropump; Valve; Vibrating flow pump

Indexed keywords

DRIVING FREQUENCIES; FLEXIBLE MATERIALS; FLOW CHARACTERISTIC; HYDROSTATIC HEAD; LIQUID FLOW; MAGNETIC PARTICLE; MAXIMUM FLOW RATE; MECHANICAL CONNECTIONS; MEMS TECHNOLOGY; MICRO PIV; MICRO PUMP; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; PARTICLE IMAGE VELOCIMETRIES; PUMP PERFORMANCE; PUMPING PERFORMANCE; PUMPING PROCESS; VELOCITY FIELD; VIBRATION CHARACTERISTICS; VOLUME FLOW RATE;

DESIGN; ELECTROMECHANICAL DEVICES; ELECTROOSMOSIS; HYDRAULICS; HYDRODYNAMICS; MEMS; MICROCHANNELS; ORIFICES; PUMPS; VALVES (MECHANICAL); VELOCITY; VELOCITY MEASUREMENT;

FLOW RATE;

EID: 84871777699     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-012-0988-5     Document Type: Article

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