Aerosol assisted chemical vapor deposition of transparent conductive zinc oxide films

Chemistry of Materials

Volumn 24, Issue 24, 2012, Pages 4704-4710

  Bhachu, Davinder S ^a   Sankar, Gopinathan ^a   Parkin, Ivan P ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

AACVD; thin films; transparent conducting oxide; zinc oxide

Indexed keywords

AACVD; AEROSOL-ASSISTED CHEMICAL VAPOR DEPOSITIONS; ALUMINUM CONCENTRATION; ALUMINUM DOPED ZINC OXIDE FILMS; DIETHYL ZINC; DOPANT AMOUNT; DUAL SOURCE; FLUORINE CONCENTRATIONS; HIGH TRANSMISSION; OXIDE STRUCTURES; PHOTOVOLTAIC APPLICATIONS; SURFACE-TEXTURING; TRANSPARENT CONDUCTING OXIDE; TRANSPARENT CONDUCTIVE; TRIMETHYLALUMINIUM; VISIBLE REGION; WAVELENGTH DISPERSIVE X-RAYS; ZNO FILMS;

AEROSOLS; ALUMINUM; CHEMICAL VAPOR DEPOSITION; ELECTRIC PROPERTIES; FLUORINE; METALLIC FILMS; METHANOL; OPTICAL FILMS; OXIDE FILMS; SHEET RESISTANCE; THIN FILMS; TIN; TIN OXIDES; TOLUENE; VAPORS; ZINC OXIDE;

SEMICONDUCTOR DOPING;

EID: 84871534594     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm302913b     Document Type: Article

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