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Volumn 7, Issue , 2012, Pages
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Mechanical properties of sintered meso-porous silicon: A numerical model
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Author keywords
Finite element method; Homogenization; Irregular microstructure; Porous silicon
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Indexed keywords
ELASTIC MODULI;
ELECTROMECHANICAL DEVICES;
ETCHING;
FINITE ELEMENT METHOD;
HIGH TEMPERATURE APPLICATIONS;
HOMOGENIZATION METHOD;
INTELLIGENT SYSTEMS;
MEMS;
MICROSTRUCTURE;
MONTE CARLO METHODS;
POROSITY;
POROUS MATERIALS;
SHEAR STRAIN;
SINTERING;
CYLINDRICAL PORES;
INTERPOLATION FUNCTION;
IRREGULAR MICROSTRUCTURE;
MESOPOROUS SILICON;
MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES;
OPTICAL AND ELECTRICAL PROPERTIES;
RANDOMLY DISTRIBUTED;
UPPER AND LOWER BOUNDS;
POROUS SILICON;
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EID: 84870985150
PISSN: 19317573
EISSN: 1556276X
Source Type: Journal
DOI: 10.1186/1556-276X-7-597 Document Type: Article |
Times cited : (15)
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References (9)
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