Soft breakdown of ultra-thin gate oxide layers

European Solid-State Device Research Conference

Volumn , Issue , 1995, Pages 235-238

  Depas, M ^a   Heyns, M M ^a   Mertens, P W ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

SOFT BREAKDOWN; ULTRA THIN GATE OXIDE;

EID: 84870747416     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)