A novel torsional microactuator using bulk PZT

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Volumn 2, Issue , 2003, Pages 1332-1337

  Friend, J R ^a   Nakamura, K ^a   Ueha, S ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Actuators; Electrodes; Fasteners; Microactuators; Piezoelectric materials; Piezoelectric transducers; Testing; Torque measurement; Velocity measurement; Zirconium

Indexed keywords

ACTUATORS; ELECTRODES; FASTENERS; INTELLIGENT MECHATRONICS; MATERIALS TESTING; MICROACTUATORS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; TESTING; TORQUE MEASUREMENT; VELOCITY MEASUREMENT; ZIRCONIUM;

ACTUATOR SYSTEM; LEAD ZIRCONIUM TITANATE; PHOSPHOR BRONZE; RECTANGULAR PRISMS; SPEED PERFORMANCE; TORSIONAL MOTION; TORSIONAL VIBRATION; VIBRATION VELOCITY;

VIBRATIONS (MECHANICAL);

EID: 84870496264     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/AIM.2003.1225536     Document Type: Conference Paper

References (12)

1. Nemoto Sakurao and Eiji Mori, "Bolt-clamped electrostrictive torsional resonator," in Proceedings of the Acoustical Society of Japan, 1972, vol. 28-3, pp. 117-126.
2. S. Ueha and Y. Tomikawa, Ultrasonic Motors - Theory and Applications, vol. 29 of Monographs in Electrical and Electronic Engineering, Clarendon Press, Oxford, 1993.
3. Robert Adler, "Torsional wave transducer," U.S. Patent Number 3,719,907, March 6, 1973, 7 Claims, Assignee: Zenith Radio Corporation, Chicago, IL.
4. H. N. Beveridge and W. W. Keith, "Piezoelectric transducers for wide range ultrasonic delay lines," Proceedings of the I.R.E, vol. 40, pp. 828-835, 1952.
5. Takeshi Morita, R. Yoshida, Y. Okamoto, M. K. Kurosawa, and T. Higuchi, "A smooth impact rotation motor using a multi-layered torsional piezoelectric actuator," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 46, no. 6, pp. 1439-1445, 1999.
6. Robert Carter, "Torsional vibration drive," U.S. Patent Number 5,063,321, November 5, 1991, 3 Claims, Assignee: Teldix GmbH, Heidelberg, Federal Republic of Germany.
7. Minoru Kurosawa and Sadayuki Ueha, "Hybrid transducer type ultrasonic motor," in IEEE Ultrasonics Symposium, 1990, pp. 1205-1209.
8. M. Aoyagi, Y. Tomikawa, and T. Takano, "Ultrasonic motors using longitudinal and bending multimode vibrators with mode coupling by externally additional asymmetry or internal nonlinearity," Japan Journal of Applied Physics, vol. 31, no. 9B, pp. 3077-3080, 1992.
9. Hoshiro Tomikawa, Hazunari Adachi, Manabu Aoyagi, Tadaatsu Sagae, and Takehiro Takano, "Some constructions and characteristics of rod-type piezoelectric ultrasonic motors using longitudinal and torsional vibrations," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 39, no. 5, pp. 600-608, September 1992.
10. T. Morita, M. Kuribayashi Kurosawa, and T. Higuchi, "A cylindrical micro ultrasonic motor using pzt thin film deposited by single process hydrothermal method (phi 2.4 mm, 1=10 mm stator transducer)," IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol. 45, no. 5, pp. 1178-87, 1998.
11. A. Boresi and K. Chong, Elasticity in Engineering Mechanics, vol. 28 of Monographs in Electrical and Electronic Engineering, Elsevier, Oxford, 1987.
12. Kentaro Nakamura, Minoru Kurosawa, Hisayuki Kurebayashi, and Sadayuki Ueha, "An estimation of load characteristics of an ultrasonic motor by measuring transient responses," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 38, no. 5, pp. 481-485, 1991.