A 2.8-mm imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography

Journal of Microelectromechanical Systems

Volumn 21, Issue 6, 2012, Pages 1291-1302

  Samuelson, Sean R ^a   Wu, Lei ^b,c   Sun, Jingjing ^a   Choe, Se Woon ^d   Sorg, Brian S ^a,e   Xie, Huikai ^a,b  

^a University of Florida   (United States)

^b WiOptix Inc   (United States)

^c Digital Optics Corporation   (United States)

^d UNIVERSITY OF FLORIDA   (United States)

^e NATIONAL CANCER INSTITUTE   (United States)

Author keywords

Bimorph; endoscopes; endoscopic optical coherence tomography (EOCT); microelectromechanical systems (MEMS); microoptoelectromechanical systems (MOEMS); optical coherence tomography (OCT)

Indexed keywords

BIMORPH; CHIP SIZES; ENDOSCOPIC OPTICAL COHERENCE TOMOGRAPHY; FABRICATED DEVICE; HIGH RESOLUTION; IMAGING PROBE; MEMS MIRRORS; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; NORMAL TISSUE; OCT IMAGING; OPTICAL ANGLE; OPTICAL COHERENCE TOMOGRAPHY PROBES; PACKAGING TECHNIQUES; TIME DOMAIN; TUMOR CELLS;

ELECTROMECHANICAL DEVICES; ENDOSCOPY; MEMS; MIRRORS; MOEMS; PACKAGING; PROBES; TISSUE; WIRE;

OPTICAL TOMOGRAPHY;

EID: 84870485815     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2209404     Document Type: Article

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