Wideband tunable Love wave filter using electrostatically actuated MEMS variable capacitors integrated on lithium niobate

Sensors and Actuators, A: Physical

Volumn 188, Issue , 2012, Pages 456-462

  Yasue, Toshiki ^a   Komatsu, Tomoya ^b   Nakamura, Nobuyuki ^b   Hashimoto, Ken Ya ^b   Hirano, Hideki ^a   Esashi, Masayoshi ^a   Tanaka, Shuji ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b CHIBA UNIVERSITY   (Japan)

Author keywords

Love wave; SAW filter; Tunable filter; Variable capacitor

Indexed keywords

3 DB BANDWIDTH; CENTER FREQUENCY; CUT-OFF CHARACTERISTIC; ELECTROMECHANICAL COUPLING COEFFICIENTS; LITHIUM NIOBATE; LOVE WAVE; LOVE WAVE FILTERS; LOW INSERTION LOSS; MEMS VARIABLE CAPACITORS; SA WFILTER; TUNABILITIES; TUNABLE BANDPASS FILTER; TUNABLE FILTERS; VARIABLE CAPACITOR; WIDE BANDWIDTH; WIDE TUNING RANGE; WIDE-BAND; WIDE-BAND TUNABLE FILTERS; WIRELESS SYSTEMS;

ACOUSTIC SURFACE WAVE FILTERS; BANDWIDTH; ELECTROMECHANICAL COUPLING; ELECTROSTATIC ACTUATORS; RESONATORS; VARIABLE FREQUENCY OSCILLATORS;

CAPACITORS;

EID: 84870058169     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.01.017     Document Type: Conference Paper

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