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Volumn , Issue , 2012, Pages 776-780
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Selection of the PSO parameters for inverting of ellipsometry
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Author keywords
ellipsometry; parameter selection; particle swarm optimization
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Indexed keywords
GLOBALOPTIMUM;
INERTIA WEIGHT;
LEARNING PARAMETERS;
PARAMETER SELECTION;
ELECTRONICS ENGINEERING;
PARTICLE SWARM OPTIMIZATION (PSO);
ELLIPSOMETRY;
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EID: 84870002611
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ICICEE.2012.207 Document Type: Conference Paper |
Times cited : (3)
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References (5)
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