|
Volumn , Issue , 2012, Pages 1974-1977
|
Metrology and process optimization for large area monolithically integrated Cu(In,Ga)Se2 modules
a a a a a a a a a |
Author keywords
CIGS; electroluminescence; metrology; monolithic integrated circuits; photovoltaic cells; thin film devices
|
Indexed keywords
ARGON GAS;
CDS BUFFER;
CIGS;
CIRCUIT STRUCTURES;
CU(IN , GA)SE;
DEVICE PERFORMANCE;
FILM DENSITY;
HIGHER EFFICIENCY;
HOMOGENEOUS NUCLEATION;
IN-PROCESS;
LARGE AREA MODULE;
MODULE EFFICIENCY;
MONOLITHICALLY INTEGRATED;
NICHE MARKETS;
NON-UNIFORMITIES;
PARTICLE GENERATION;
PHOTOVOLTAIC;
ROOT CAUSE;
SMALL AREA;
SOLAR MODULE;
SPECULAR REFLECTANCE;
SPUTTER PRESSURE;
TRANSPORT SPEED;
ARGON;
CADMIUM COMPOUNDS;
CADMIUM SULFIDE;
EFFICIENCY;
GALLIUM;
MANUFACTURE;
MEASUREMENTS;
MOLYBDENUM;
MONOLITHIC INTEGRATED CIRCUITS;
OPTIMIZATION;
PHOTOVOLTAIC CELLS;
PROCESS CONTROL;
SEMICONDUCTING SELENIUM COMPOUNDS;
THIN FILM DEVICES;
THIN FILMS;
UNITS OF MEASUREMENT;
ELECTROLUMINESCENCE;
|
EID: 84869464351
PISSN: 01608371
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/PVSC.2012.6317983 Document Type: Conference Paper |
Times cited : (1)
|
References (5)
|