Formation of silver nanoparticles in silicon by metal vapor vacuum arc ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 292, Issue , 2012, Pages 50-54

  Seo, H W ^a   Chen, Q Y ^b,c   Rusakova, I A ^b   Zhang, Z H ^b   Wijesundera, D ^b   Yeh, S W ^c   Wang, X M ^b   Tu, L W ^c   Ho, N J ^c   Wu, Y G ^d   Zhang, H X ^d   Chu, W K ^b  

^a University of Arkansas ^*  (United States)

^b University of Houston   (United States)

^c NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^d BEIJING NORMAL UNIVERSITY   (China)

Author keywords

Ion implantation; Metal vapor vacuum arc (MEVVA); Nanoparticles; Schottky junction

Indexed keywords

AG ATOMS; AG NANOPARTICLE; DEPTH PROFILE; ELEVATED TEMPERATURE; METAL VAPOR VACUUM ARCS; OUT-DIFFUSION; P-TYPE SI; PN-DIODE; SCHOTTKY JUNCTIONS; SI SURFACES; SILICON MATRIX; SILVER NANOPARTICLES; SILVER PARTICLES; SOLID PHASE EPITAXY; SPUTTERING PROCESS; STEADY STATE;

ALUMINUM; ION IMPLANTATION; ION SOURCES; NANOPARTICLES; SILICON; VACUUM APPLICATIONS; VACUUM TECHNOLOGY; VAPORS;

SILVER;

EID: 84869420270     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2012.09.021     Document Type: Article

References (17)

1. A.H. Sommer Photoemissive Materials 1968 John Wiley and Sons New York
2. C.W. Bates Jr., and N. Alexander J. Opt. Soc. Am. A2 1985 1848
3. Q.Y. Chen, and C.W. Bates Jr. Phys. Rev. Lett. 57 1986 2737
4. Q.Y. Chen, and C.W. Bates Jr. Phys. Rev. B 37 1988 9148
5. C.W. Bates Jr., and Q.Y. Chen J. Appl. Phys. 81 1997 1457
6. J.A. Davies Can. J. Phys. 45 1967 4053
7. C.W. Bates Jr, and Q.Y. Chen Mat. Lett. 23 1995 7
8. L.E. James, J.W. Mayer, and J. Davies Ion Implantation in Semiconductors 1970 Academic Press New York
9. J.W. Mayer Can. J. Phys. 45 1967 4073
10. M. Moskovits Rev. Mod. Phys. 57 1985 783
11. S. Pillai J. Appl. Phys. 101 2007 093105
12. S.Z.M.G. Chumanov Nanoparticle Assemblies and Superstructures 2005 CRC Press Boca Raton, FL
13. L. Zhao, K.L. Kelly, and G.C. Schatz J. Phys. Chem. B 107 2003 7343
14. H. Zhang, X. Zhang, F. Zhou, S. Zhang, Q. Li, and Z. Han Rev. Sci. Instrum. 65 1994 3088
15. Y. Wu, T. Zhang, Y. Zhang, H. Zhang, and G. Zhou Nucl. Instrum. Meth. Phys. Res. B 173 2001 292
16. J.F. Ziegler, J.P. Biersack, and M.D. Ziegler SRIM - The Stopping and Range of Ions in Matter 2008 Ion Implantation Press Chester, Maryland
17. Q.H. Hua, E.S. Yang, and H. Izmirliya Solid-State Electron. 25 12 1982 1187