Monolithically integrated thermoelectric energy harvester based on silicon nanowire arrays for powering micro/nanodevices

Nano Energy

Volumn 1, Issue 6, 2012, Pages 812-819

  Dávila, Diana ^a,b   Tarancón, Albert ^b   Calaza, Carlos ^a   Salleras, Marc ^a   Fernández Regúlez, Marta ^a   San Paulo, Alvaro ^c   Fonseca, Luis ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b CATALONIA INSTITUTE FOR ENERGY RESEARCH IREC   (Spain)

^c INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

Author keywords

Energy harvesting; Self powered micro nanodevice; Silicon nanowires; Thermoelectric microgenerator; Thermoelectricity

Indexed keywords

DENSE ARRAYS; ELECTRICAL CONTACTS; ENERGY HARVESTER; HORIZONTAL ARRAYS; MICROFABRICATED; MICROGENERATORS; MONOLITHICALLY INTEGRATED; ONE-DIMENSIONAL (1D) NANOWIRES; PLANAR GEOMETRIES; POWER DENSITIES; SEEBECK VOLTAGE; SELF-POWERED; SILICON NANOWIRE ARRAYS; SILICON NANOWIRES; SILICON STRUCTURES; SILICON TECHNOLOGIES; SINGLE NANOWIRES; TEMPERATURE DIFFERENCES; THERMAL MASS; THERMOELECTRIC ENERGY; THERMOELECTRIC MICRO-GENERATOR; THERMOELECTRIC PROPERTIES;

ENERGY HARVESTING; MICROFABRICATION; MONOLITHIC INTEGRATED CIRCUITS; NANOWIRES; SEMICONDUCTOR MATERIALS; THERMOELECTRICITY;

SILICON;

EID: 84868692999     PISSN: 22112855     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nanoen.2012.06.006     Document Type: Article

References (33)

1. Tan Y.K., Panda S.K. Review of Energy Harvesting Technologies for Sustainable Wireless Sensor Network, Sustainable Wireless Sensor Networks. InTech 2010, W. Seah, Y.K. Tan (Eds.).
2. Huang Y., Duan X., Cui Y., Lauhon L.J., Kim K.-H., Lieber C.M. Science 2001, 294:1313.
3. Bachtold A., Hadley P., Nakanishi T., Dekker C. Science 2001, 294:1317.
4. Wang X., Song J., Liu J., Wang Z.L. Science 2007, 316:102-105.
5. Wang X. Nano Energy 2012, 1:13-24.
6. Snyder G.J. Thermoelectrics Handbook: Macro to Nano. CRC/Taylor & Francis 2006, D.M. Rowe (Ed.).
7. Snyder G.J., Toberer E.S. Nature Materials 2008, 7:105-114.
8. Critical Materials Strategy, U.S. Department of Energy (2010) 1-166.
9. Hicks L.D., Dresselhaus M.S. Physical Review B 1993, 47:12727-12731.
10. Dresselhaus M.S., Chen G., Tang M., Yang R., Lee H., Wang D., Ren Z., Fleurial J.-P., Gogna P. Advanced Materials 2007, 19:1043-1053.
11. Boukai A.I., Bunimovich Y., Tahir-Kheli J., Yu J.-K., Goddard W.A., Heath J.R. Nature 2008, 451:168-171.
12. Hochbaum A.I., Chen R., Delgado R.D., Liang W., Garnett E.C., Najarian M., Majumdar A., Yang P. Nature 2008, 451:163-167.
13. Zhang G., Zhang Q., Bui C.-T., Lo G.-Q., Li B. Applied Physics Letters 2009, 94:213108.
14. Shakouri A. Proceedings of the IEEE 2006, 94:1613-1638.
15. Vo T.T.M., Williamson A.J., Lordi V., Galli G. Nano Letters 2008, 8:1111-1114.
16. Li D., Wu Y., Kim P., Shi L., Yang P., Majumdar A. Applied Physics Letters 2003, 83:2934.
17. Islam M.S., Sharma S., Kamins T.I., Williams R.S. Nanotechnology 2004, 15:L5-L8.
18. He R., Gao D., Fan R., Hochbaum A.I., Carraro C., Maboudian R., Yang P. Advanced Materials 2005, 17:2098-2102.
19. Paulo A.S., Arellano N., Plaza J.A., He R., Carraro C., Maboudian R., Howe R.T., Bokor J., Yang P. Nano Letters 2007, 7:1100-1104.
20. Nebol'sin V.A., Shchetinin A.A. Inorganic Materials 2003, 39:899-903.
21. Hannon J.B., Kodambaka S., Ross F.M., Tromp R.M. Nature 2006, 440:69-71.
22. Wang Y., Schmidt V., Senz S., Gösele U. Nature Nanotechnology 2006, 1:186-189.
23. Krylyuk S., Davydov A.V., Levin I. ACS Nano 2011, 5:656-664.
24. Dávila D., Tarancó A., Fernández-Regúlez M., Calaza C., Salleras M., Paulo San, Fonseca L. Journal of Micromechanics and Microengineering 2011, 21:104007.
25. Dávila D., Tarancón A., Kendig D., Fernández-Regúlez M., Sabaté N., Salleras M., Calaza C., Cané C., Gràcia I., Figueras E., Santander J., Paulo San, Shakouri A., Fonseca L. The Journal of Electronic Materials 2011, 40:851-855.
26. Magagnin L. Microelectronic Engineering 2002, 64:479-485.
27. Gao D., He R., Carraro C., Howe R.T., Yang P., Maboudian R. Journal of the American Chemical Society 2005, 127:4574-4575.
28. Yu J.-K., Mitrovic S., Tham D., Varghese J., Heath J.R. Nature Nanotechnology 2010, 5:718-721.
29. Christofferson J., Maize K., Ezzahri Y., Shabani J., Wang X., Shakouri A. Journal of Electronic Packaging 2008, 130:041101.
30. Christofferson J., Shakouri A. Review of Scientific Instruments 2005, 76:024903.
31. Li Y., Buddharaju K., Singh N., Lee S. The Journal of Electronic Materials 2012, 12-15.
32. Micropelt, MPG-D651, MPG-D751 Thin Film Thermogenerators and Sensing Devices Data Sheet.
33. Nextreme, eTEG HV56 Power Generator Preliminary Data Sheet.