A facile method to fabricate close-packed concave microlens array on cylindrical glass

Journal of Micromechanics and Microengineering

Volumn 22, Issue 11, 2012, Pages

  Deng, Zefang ^a   Chen, Feng ^a   Yang, Qing ^a   Liu, Hewei ^a   Bian, Hao ^a   Du, Guangqing ^a   Hu, Yang ^a   Si, Jinhai ^a   Meng, Xiangwei ^a   Hou, Xun ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL WET ETCHING PROCESS; CONCAVE MICROLENS ARRAYS; CONCAVE STRUCTURES; FACILE METHOD; FEMTOSECONDS; HIGH FILLS; HIGH PACKING DENSITY; LASER EXPOSURE; LASER POWER; LASER SCANNING CONFOCAL MICROSCOPES; MORPHOLOGICAL CHARACTERISTIC; POLYMER CASTING; SCANNING ELECTRON MICROSCOPE; SHAPE AND SIZE;

LASERS; MICROOPTICS; SCANNING ELECTRON MICROSCOPY; WET ETCHING;

OPTICAL INSTRUMENT LENSES;

EID: 84867949200     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/11/115026     Document Type: Article

References (21)

1. Li L and Yi A Y 2009 Microfabrication on a curved surface using 3D microlens array projection J. Micromech. Microeng. 19 105010
2. Liu S-J and Chang Y-C 2007 A novel soft-mold roller embossing method for the rapid fabrication of micro-blocks onto glass substrates J. Micromech. Microeng. 17 172-9 (Pubitemid 46476602)
3. Jeong K-H, Kim J and Lee L P 2006 Biologically inspired artificial compound eyes Science 312 557-61
4. Kim J-J, Chae S and Feong K-H 2010 Micropatterned single lens for wide-angle light-emitting diodes Opt. Lett. 35 823-5
5. Rim S-B, Catrysse P B, Dinyari R, Huang K and Peumans P 2008 The optical advantages of curved focal plane arrays Opt. Express 16 4965-71 (Pubitemid 351483459)
6. Jiang L-T, Huang T-C, Chiu C-R, Chang C-Y and Yang S-Y 2007 Fabrication of plastic microlens arrays using hybrid extrusion rolling embossing with a metallic cylinder mold fabricated using dry film resist Opt. Express 15 12088-94 (Pubitemid 47460073)
7. Wu M-H, Park C and Whitesides G M 2002 Fabrication of arrays of microlens with controlled profiles using gray-scale microlens projection photolithography Lagnmuir 18 9312-8 (Pubitemid 35458191)
8. Lin C-P, Yang H and Chao C-K 2003 Hexagonal microlens array modeling and fabrication using a thermal reflow process J. Micromech. Microeng. 13 775-81
9. Chang S, Yoon J-B, Kim H, Kim J-J, Lee B-K and Shin D H 2006 Microlens array diffuser for a light-emitting diode backlight system Opt. Lett. 31 3016-8 (Pubitemid 44664594)
10. Danzebrink R and Aegerter M A 2001 Deposition of optical microlens array by ink-jet processes Thin Solid Films 392 223-5 (Pubitemid 32618190)
11. Childs W R and Nuzzo R G 2004 Patterning of thin-film microstructures on non-planar substrate surfaces using decal transfer lithography Adv. Mater. 5 1323-7
12. Chan E P and Crosby A J 2006 Fabricating microlens arrays by surface wrinkling Adv. Mater. 18 3238-42 (Pubitemid 46080219)
13. Xie Y, Lu Z, Li F, Zhao J and Weng Z 2002 Lithographic fabrication of large diffractive optical elements on a concave lens surface Opt. Express 10 1043-5
14. Radtke D, Duparré J, Zeitner U D and Andreas 2007 Laser lithographic fabrication and characterization of a spherical artificial compound eye Opt. Express 15 3067-77 (Pubitemid 46457170)
15. Scheiding S, Yi A Y, Gebhardt A, Li L, Risse S, Eberhardt R and Tünnermann A 2011 Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo Opt. Express 19 23938-51
16. Chen F, Liu H, Yang Q, Wang X, Hou C, Bian H, Liang Weiwei, Si J and Hou X 2010 Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method Opt. Express 18 20334-43
17. Roeterdink W G, Juurlink L B F, Vaughan O P H, Diez J D, Bonn M and Kleyn A W 2003 Coulomb explosion in femtosecond laser ablation of Si(111) Appl. Phys. Lett. 79 4190-2
18. Gattass R R and Mazur E 2008 Femtosecond laser micromachining in transparent materials Nature Photoni. 2 219-25
19. Sakakura M, Terazima M, Shimotsuma Y, Miura K and Hirao K 2007 Observation of pressure wave generated by focusing a femtosecond laser pulse inside a glass Opt. Express 15 5674-86 (Pubitemid 46699028)
20. Bellouard Y, Said A, Dugan M and Bado P 2004 Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching Opt. Express 12 2120-9
21. Park B G, Choi K, Jo C J and Lee H S 2011 Micro-lens-on-lens array Soft Matter 8 1751-5