Integration of piezoelectric polymer transducers into microsystems for sensing applications

Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012

Volumn , Issue , 2012, Pages

  Schulze, R ^a   Gessner, T ^a   Heinrich, M ^a   Schueller, M ^b   Forke, R ^b   Billep, D ^b   Sborikas, M ^c   Wegener, M ^c  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b FRAUNHOFER INSTITUTE FOR ELECTRONIC NANO SYSTEMS ENAS   (Germany)

^c FRAUNHOFER INSTITUTE FOR APPLIED POLYMER RESEARCH   (Germany)

Author keywords

microinjection molding technology; piezoelectric polymer transducer; polymer based microsystems; smart systems integration

Indexed keywords

BONDING TECHNIQUES; CHARGE SENSITIVITY; CHARGE SEPARATIONS; COMPOUND STRUCTURES; FINITE ELEMENT SIMULATIONS; FUNCTIONAL COMPONENTS; LOW FREQUENCY; MICRO-INJECTION MOLDING; OUT-OF-PLANE; PIEZOELECTRIC LAYERS; PIEZOELECTRIC POLYMER TRANSDUCER; POLYVINYLIDENE FLUORIDES; PREPARATION TECHNOLOGY; RESONANCE FREQUENCIES; SEISMIC MASS; SENSING APPLICATIONS; SENSOR CONCEPTS; SENSOR SIGNALS; SMART SYSTEM; SYSTEM INTEGRATION;

COMMINUTION; MICROSYSTEMS; MOLDING; PIEZOELECTRICITY; POLYMER MEMBRANE ELECTRODES; SENSORS; TRANSDUCERS;

POLYMERS;

EID: 84867909528     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISAF.2012.6297771     Document Type: Conference Paper

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