Inductively-coupled nonthermal plasma for synthesis of silicon nanocrystals

Journal of the Korean Physical Society

Volumn 61, Issue 7, 2012, Pages 995-997

  Oh, Kyoung Suk ^a,b   Kim, Seongbeom ^a   Lee, Jeong Chul ^a   Sohn, Young Soo ^c  

^a Ulsan National Institute of Science and Technology   (South Korea)

^b Chungnam National University   (South Korea)

^c Catholic University of Daegu   (South Korea)

Author keywords

Nanocrystals; Nonthermal plasma; Silicon

Indexed keywords

EID: 84867463540     PISSN: 03744884     EISSN: 19768524     Source Type: Journal    
DOI: 10.3938/jkps.61.995     Document Type: Letter

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