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Volumn , Issue , 2012, Pages 399-405
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LTCC membranes with integrated heating structures, temperature sensors and strain gauges
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Author keywords
[No Author keywords available]
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Indexed keywords
BASE COMPONENTS;
CONDUCTOR PASTE;
DEFORMABLE MIRRORS;
DIFFERENT GEOMETRY;
HEATING STRUCTURES;
INTEGRATED SENSORS;
MANUFACTURING PROCESS;
POST-FIRE;
RESISTANCE TEMPERATURE;
SENSOR ELEMENTS;
TEMPERATURE TREATMENTS;
WAVEFRONT CORRECTION;
HIGH ENERGY LASERS;
POWER ELECTRONICS;
SENSORS;
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EID: 84867050679
PISSN: 21612528
EISSN: 21612536
Source Type: Conference Proceeding
DOI: 10.1109/ISSE.2012.6273169 Document Type: Conference Paper |
Times cited : (2)
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References (6)
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