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Volumn , Issue , 2012, Pages 399-405

LTCC membranes with integrated heating structures, temperature sensors and strain gauges

Author keywords

[No Author keywords available]

Indexed keywords

BASE COMPONENTS; CONDUCTOR PASTE; DEFORMABLE MIRRORS; DIFFERENT GEOMETRY; HEATING STRUCTURES; INTEGRATED SENSORS; MANUFACTURING PROCESS; POST-FIRE; RESISTANCE TEMPERATURE; SENSOR ELEMENTS; TEMPERATURE TREATMENTS; WAVEFRONT CORRECTION;

EID: 84867050679     PISSN: 21612528     EISSN: 21612536     Source Type: Conference Proceeding    
DOI: 10.1109/ISSE.2012.6273169     Document Type: Conference Paper
Times cited : (2)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.