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Volumn 35, Issue 4, 2012, Pages 579-584
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Characterization of piezoelectric polymer composites for MEMS devices
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Author keywords
Finite element analysis; MEMS; Piezocomposites
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Indexed keywords
ANSYS SOFTWARE;
APPROXIMATE RESULTS;
BULK MATERIALS;
COMPOSITE THIN FILMS;
ELECTROMECHANICAL COUPLING COEFFICIENTS;
EXPERIMENTAL DATA;
FINITE ELEMENT METHOD FEM;
K-VALUES;
MATERIAL PROPERTY;
MEDICAL DIAGNOSTIC DEVICE;
MEMSDEVICES;
MICROMETER SCALE;
PIEZO-CERAMICS;
PIEZOCOMPOSITES;
PIEZOELECTRIC POLYMERS;
PVDF LAYERS;
PZT;
SIMULATED DATA;
SIMULATION PROCESS;
ACOUSTIC IMPEDANCE;
COMPUTER SIMULATION;
DIELECTRIC LOSSES;
ELECTROMECHANICAL COUPLING;
FINITE ELEMENT METHOD;
MEMS;
MICROMETERS;
NANOCOMPOSITE FILMS;
PIEZOELECTRIC CERAMICS;
THIN FILMS;
TRANSDUCERS;
COMPOSITE MATERIALS;
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EID: 84866456283
PISSN: 02504707
EISSN: None
Source Type: Journal
DOI: 10.1007/s12034-012-0319-1 Document Type: Article |
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Times cited : (8)
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References (6)
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