Passive technologies for future large-scale photonic integrated circuits on silicon: Polarization handling, light non-reciprocity and loss reduction

Light: Science and Applications

Volumn 1, Issue MARCH, 2012, Pages

  Dai, Daoxin ^a,b   Bauters, Jared ^a   Bowers, John E ^a  

^a University of California   (United States)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

Integration; Low loss; Non reciprocal; Polarization; Silicon

Indexed keywords

EID: 84865505991     PISSN: None     EISSN: 20477538     Source Type: Journal    
DOI: 10.1038/lsa.2012.1     Document Type: Review

References (100)

1. Welch DF, Kish FA, Melle S, Nagarajan R, Kato M et al. Large-scale InP photonic integrated circuits: enabling efficient scaling of optical transport networks. IEEE J Select Top Quantum Electron 2007; 13: 22-31.
2. Nicholes SC, Mǎ;sanovic ML, Jevremovic B, Lively E, Coldren LA et al. An 8×8 InP monolithic tunable optical router (motor) packet forwarding chip. J Lightwave Technol 2010; 28: 641-50.
3. Liang D, Bowers JE. Photonic integration: Si or InP substrates? Electron Lett 2009; 45: 578-81.
4. Coldren LA, Nicholes SC, Johansson L, Ristic S, Guzzon RS et al. High performance InP-based photonic ICs - a tutorial. J Lightwave Technol 2011; 29: 554-70.
5. Infinera's 400 Gb/s PIC sets new record for integration. 23 March 2009. http://www.infinera.com/j7/servlet/NewsItem?newsItemID5150
6. Barwicz T, Watts M, Popovic M, Rakich P, Socci L et al. Polarization-transparent microphotonic devices in the strong confinement limit. Nature Photon 2007; 1: 57-60.
7. Sasaki K, Ohno F, Motegi A, Baba T. Arrayed waveguide grating of 70×60μm2 size based on Si photonic wire waveguides. Electron Lett 2005; 41: 801-2. (Pubitemid 41048295)
8. Dai D. Liu L, Wosinski L, He S. Design and fabrication of ultra-small overlapped AWG demultiplexer based on alpha-Si nanowire waveguides. Electron Lett 2006; 42: 400-2.
9. Bogaerts W, Selvaraja SK, Dumon P, Brouckaert J, Vos DK et al. Silicon-on-insulator spectral filters fabricated with CMOS technology. IEEE J Sel Top Quant Electron 2010; 16: 33-44.
10. Fukuda H, Yamada K, Tsuchizawa T, Watanabe T, Shinojima H et al. Silicon photonic circuit with polarization diversity. Opt Express 2008; 16: 4872-80. (Pubitemid 351483450)
11. Sheng Z, Dai D, He S. Comparative study of losses in ultrasharp silicon-on-insulator nanowire bends. IEEE J Sel Top Quant Electron 2009; 15: 1406-112.
12. Liang D, Bowers JE. Recent progress in lasers on silicon. Nature Photon 2010; 4: 511-7.
13. Alduino A, Liao L, Jones R, Morse M, Kim B et al. Demonstration of a high speed 4-channel integrated silicon photonics WDM link with hybrid silicon lasers. OSA technical digest (CD) (Optical Society of America, 2010) in Integrated photonics research, silicon and nanophotonics. Paper PDIWI5
14. Kurczveil G, Heck MJ, Garcia JM, Poulsen HN, Park H et al. Integrated recirculating optical hybrid silicon buffers. SPIE Photonics West; 24 January 2011; San Francisco, CA, USA. SPIE: San Francisco, CA, USA.
15. Faralli S, Nguyen KN, Chen HW, Peters JD, Garcia JM et al. 25 Gbaud DQPSK receiver integrated on the hybrid silicon. Proceedings of 8th IEEE International Conference on Group IV Photonics (GFP); 14-16 September 2011; London, UK, 2011, pp326-8
16. Smit MK, Bente EA, Hill MT, Karouta F, Leijtens XJ et al. Current status and prospects of photonic IC technology. Proceedings of IEEE Conference on Indium Phosphide Related Materials; 14-18 May 2007; Matsue, Japan. IEEE: Matsue, Japan, 2007, pp3-6. (Pubitemid 47486454)
17. Dai D, He S. Design of a polarization-insensitive arrayed waveguide grating demultiplexer based on silicon photonic wires. Opt Lett 2006; 31: 1988-90. (Pubitemid 44542751)
18. Dai D, Shi Y, He S. Theoretical Investigation for reducing polarization-sensitivity in Sinanowire-based arrayed-waveguide grating (de)multiplexer with polarization-beam-splitters and reflectors. IEEE J Quant Electron 2009; 45: 654-60.
19. Pfau T, Peveling R, Hauden J, Grossard N, Porte H et al. Coherent digital polarization diversity receiver for real-time polarization-multiplexed QPSK transmission at 2.8 Gb/s. IEEE Photon Technol Lett 2007; 19: 1988-90. (Pubitemid 350226006)
20. Tien MC, Mizumoto T, Pintus P, Kromer H, Bowers JE. Silicon ring isolators with bonded nonreciprocal magneto-optic garnets. Opt Express 2011; 19: 11740-5.
21. Ciminelli C, Olio FD, Campanella CE, Armenise MN. Photonic technologies for angular velocity sensing. Adv Opt Phot 2010; 2: 370-404.
22. Burmeister EF, Mack JP, Poulsen HN, Mašanovic ML, Stamenic B et al. Photonic integrated circuit optical buffer for packet-switched networks. Opt Express 2009; 17: 6629-35.
23. Horikawa K, Ogawa I, Kitoh T, Ogawa H. Silica-based integrated planar light-wave true-time-delay network for microwave antenna applications. Proceedings of the Optical Fiber Communication Conference; 25 February-1 March 1996; San Jose, CA, USA.Optical Society of America: Washington, DC, USA, 1996, Vol. 2, pp100-1.
24. Dong P, Qian W, Liao S, Liang H, Kung CC et al. Low loss shallow-ridge silicon waveguides. Opt Express 2010; 18: 14474-9.
25. Cardenas J, Poitras CB, Robinson JT, Preston K, Chen L et al. Low loss etchless silicon photonic waveguides. Opt Express 2009; 17: 4752-7.
26. Goykhman I, Desiatov B, Levy U. Ultrathin silicon nitride microring resonator for biophotonic applications at 970 nm wavelength. Appl Phys Lett 2010; 97: 081108.
27. Bogaerts W, Taillaert D, Dumon P, Thourhout DV, Baets R. A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires. Opt Express 2007; 15: 1567-78. (Pubitemid 46280209)
28. Fukuda H, Yamada K, Tsuchizawa T, Watanabe T, Shinojima H et al. Ultrasmall polarization splitter based on silicon wire waveguides. Opt Express 2006; 14: 12401-8. (Pubitemid 44907583)
29. Komatsu M, Saitoh K, Koshiba M. Design of miniaturized silicon wire and slot waveguide polarization splitter based on a resonant tunneling. Opt Express 2009; 17: 19225-33.
30. Liang TK, Tsang HK. Integrated PBS in high index contrast silicon-on-insulator waveguides. IEEE Photon Technol Lett 2005; 17: 393-5. (Pubitemid 40211158)
31. Augustin LM, Hanfoug R, Tol JJ, Laat WJ, Smit MK, A compact integrated polarization splitter/converter in InGaAsP-InP. IEEE Photon Technol Lett 2007; 19: 1286-8. (Pubitemid 47308020)
32. Hong JM, Ryu HH, Park SR, Jeong JW, Lee SG et al. Design and fabrication of a significantly shortened multimode interference coupler for polarization splitter application. IEEE Photon Technol Lett 2003; 15: 72-4.
33. Jiao Y, Dai D, Shi Y, He S. Shortened polarization beam splitters with two cascaded multimode interference sections. IEEE Photon Technol Lett 2009; 21: 1538-40.
34. Tu Z, Huang Y, Yi H, Wang X, Li Y et al. A compact SOI polarization beam splitter based on multimode interference coupler. Asia Communications and Photonics Conference; 13-16 November 2011; Shanghai, China. Paper 8307-06.
35. Yang BK, Shin SY, Zhang DM. Ultrashort polarization splitter using two-mode interference in silicon photonic wires. IEEE Photon Technol Lett 2009; 21: 432-4.
36. Kiyat I, Aydinli A, Dagli N. A compact silicon-on-insulator polarization splitter. IEEE Photon Technol Lett 2005; 17: 100-2. (Pubitemid 40118969)
37. Augustin LM, Tol JJ, Hanfoug RR, de Laat WJ, van de Moosdijk MJ et al. A single etchstep fabrication-tolerant polarization splitter. J Lightwave Technol 2007; 25: 740-6. (Pubitemid 46585271)
38. Xiao J, Liu X, Sun XH. Design of a compact polarization splitter in horizontal multipleslotted waveguide structures. Jpn J Appl Phys 2008; 47: 3748-54.
39. Tu XG, Ang SS, Chew AB, Teng J, Mei T. An ultracompact directional coupler based on GaAs cross-slot waveguide. IEEE Photon Technol Lett 2010; 22: 1324-6.
40. Yamazaki T, Aono H, Yamauchi J, Nakano H. Coupled waveguide polarization splitter with slightly different core widths. J Lightwave Technol 2008; 26: 3528-33.
41. Yue Y, Zhang L, Yang JY, Beausoleil RG, Willner AE. Silicon-on-insulator polarization splitter using two horizontally slotted waveguides. Opt Lett 2010; 35: 1364-1366.
42. Shi Y, Dai D, He S. Proposal for an ultra-compact PBS based on a photonic crystalassisted multimode interference coupler. IEEE Photon Technol Lett 2007; 19(11): 825-7. (Pubitemid 46812907)
43. Ao X, Liu L, Lech W, He S. Polarization beam splitter based on a two-dimensional photonic crystal of pillar type. Appl Phys Lett 2006; 89: 171115.
44. Okuno M, Sugita A, Jinguji K, Kawachi M. Birefringence control of silica waveguides on Si and its application to a polarization-beam splitter/switch. J Lightwave Technol 1994; 12: 625-34.
45. Goto N, Yip GL. A TE-TM mode splitter in LiNbO3 by proton exchange and Ti diffusion. J Lightwave Technol 1989; 7: 1567-73.
46. Ghirardi F, Brandon J, Carre M, Bruno A, Meniganx L et al. Polarization splitter based on modal birefringence in InP/InGaAsP optical waveguides. IEEE Photon Technol Lett 1993; 5: 1047-9.
47. Lin KC, Chuang WC, Lee WY. Proposal and analysis of an ultrashort directional-coupler polarization splitter with an NLC coupling layer. J Lightwave Technol 1996; 14: 2547-53.
48. Dai D, Shi Y, He S. Characteristic analysis of nanosilicon rectangular waveguides for planar light-wave circuits of high integration. Appl Opt 2006; 45: 4941-6. (Pubitemid 44561583)
49. Almeida VR, Xu Q, Barrios CA, Lipson M. Guiding and confining light in void nanostructure. Opt Lett 2004; 29: 1209-11.
50. Dai D, Wang Z, Bowers JE. Ultra-short broad-band polarization beam splitter based on an asymmetrical directional coupler. Opt Lett 2011; 36: 2590-2.
51. Dai D, Bowers JE. Novel ultra-short and ultra-broadband polarization beam splitter based on a bent directional coupler. Opt Express 2011; 19: 18614-20.
52. Feng NN, Sun R, Kimerling LC, Michel J. Lossless strip-to-slot waveguide transformer. Opt Lett 2007; 32: 1250-2. (Pubitemid 351292828)
53. Lin S,Hu J, Crozier KB. Ultracompact, broadband slot waveguide polarization splitter. Appl Phys Lett 2011; 98: 151101.
54. Chin MK, Ho ST. Design and modeling of waveguide-coupled single-mode microring resonators. J Lightwave Technol 1998; 16: 1433-46. (Pubitemid 128586577)
55. Lui WW, Hirono T, Yokoyama K, Huang WP. Polarization rotation in semiconductor bending waveguides: a coupled-mode theory formulation. J Lightwave Technol 1998; 16: 929-36. (Pubitemid 128565372)
56. Zhang J, Yu MB, Lo GQ, Kwong DL. Silicon-waveguide-based mode evolution polarization rotator. IEEE J Select Top Quantum Electron 2010; 16: 53-60.
57. Feng NN, Sun R, Michel J, Kimerling LC. Low-loss compact-size slotted waveguide polarization rotator and transformer. Opt Lett 2007; 32: 2131-3. (Pubitemid 351299460)
58. Yue Y, Zhang L, Song M, Beausoleil RG, Willner AE. Higher-order-mode assisted silicon-on-insulator 90 degree polarization rotator. Opt Express 2009; 17: 20694-9.
59. Rahman BM, Obayya SS, Rajarajan M, Grattan KT, El-Mikathi HA. Design and characterization of compact single-section passive polarization rotator. J Lightwave Technol 2001; 19: 512-9. (Pubitemid 32774736)
60. Deng HH, Yevick DO, Brooks C, Jessop PE. Design rules for slanted-angle polarization rotators. J Lightwave Technol 2005; 23: 432-45. (Pubitemid 40181735)
61. Wang Z, Dai D. Ultrasmall Si-nanowire-based polarization rotator. J Opt Soc Am B 2008; 25: 747-53.
62. Dai D, Bowers JE. Novel concept for ultracompact polarization splitter-rotator based on silicon nanowires. Opt Express 2011; 19: 10940-9.
63. Vermeulen D, Selvaraja S, Cort WA, Yebo NA, Hallynck E. et al.Efficient tapering to the fundamental Quasi-TM mode in asymmetrical waveguides, ECIO 2010; 6-9 April 2010; Cambridge, UK. Department of Information Technology; Cambridge, UK. Paper WeP16.
64. Shintaku T. Integrated optical isolator based on efficient nonreciprocal radiation mode conversion. Appl Phys Lett 1998; 73: 1946-8. (Pubitemid 128672032)
65. Shimizu H, Goto S. Evanescent semiconductor active optical isolators for low insertion loss and high gain saturation power. J Lightwave Technol 2010; 28: 1414-9.
66. Fujita J, LevyM,Osgood RM, Wilkens L, DotschH. Waveguide optical isolator based on Mach-Zehnder interferometer. Appl Phys Lett 2000; 76: 2158-60.
67. Yokoi H, Mizumoto T, Shoji Y. Optical nonreciprocal devices with a silicon guiding layer fabricated by wafer bonding. Appl Opt 2003; 42: 6605-12.
68. Yokoi H, Mizumoto T, Shinjo N, Futakuchi N, Nakano Y. Demonstration of an optical isolatorwith a semiconductor guiding layer that was obtained by use of a nonreciprocal phase shift. Appl Opt 2000; 39: 6158-64.
69. Shoji Y, Mizumoto T, Yokoi H, Hsieh IW, Osgood RM. Magneto-optical isolator with silicon waveguides fabricated by direct bonding. Appl Phys Lett 2008; 92: 3.
70. Kono N, Kakihara K, Saitoh K, Koshiba M. Nonreciprocal microresonators for the miniaturization of optical waveguide isolators. Opt Express 2007; 15: 7737-51. (Pubitemid 46906989)
71. Rostami A. Piecewise linear integrated optical device as an optical isolator using twoport nonlinear ring resonators. Opt Laser Technol 2007; 39: 1059-65. (Pubitemid 44854009)
72. Fan L, Wang J, Shen H, Varghese LT, NiuB. et al. ACMOScompatible microring-based on-chip isolator with 18dB optical isolation. In: Frontiers in Optics. Rochester: OSA; 2010. pFThQ4.
73. Shintaku T, Uno T, Kobayashi M. Magnetooptic channel waveguides in Ce-substituted yttrium-gartnet. J Appl Phys 1993; 74: 4877-81.
74. Pintus P, Tien MC, Bowers JE. Design of magneto-optical ring isolator on SOI based on the finite-element method, IEEE Photon Technol Lett 2011; 23: 1670-2.
75. Adar R, Serbin MR, Mizrahi V. Less-than-1 dB per meter propagation loss of silica wave-guides measured using a ring-resonator. J Lightwave Technol 1994; 12: 1369- 72.
76. Kominato T, Hida Y, Itoh M, Takahashi H, Sohma S et al. Extremely low-loss (0.3 dB/ m) and long silica-based waveguides with large width and clothoid curve connection. Proceedings of ECOC; 5-9 September 2004; Stockholm, Sweden, 2004.
77. Bauters JF, Heck MJR, John D, Dai D, Tien MC et al. Ultra-low-loss high-aspect-ratio Si3N4 waveguides. Opt Express 2011; 19: 3163-74.
78. Dai D, Wang Z, Bauters JF, Tien MC, Heck MJ et al. Low-loss Si3N4 arrayed-waveguide grating (de)multiplexer using nano-core optical waveguides. Opt Express 2011; 19: 14130-6.
79. Tien MC, Bauters JF, Heck MJ, Spencer DT, Blumenthal DJ et al. Ultra-high quality factor planar Si3N4 ring resonators on Si substrates. Opt Express 2011; 19: 13551-6.
80. Spillane SM, Kippenberg TJ, Vahala KJ. Ultralow-threshold Raman laser using a spherical dielectric microcavity. Nature 2002; 415: 621-3. (Pubitemid 34136384)
81. Vollmer F, Braun D, Libchaber A, Khoshsima M, Teraoka I et al. Protein detection by optical shift of a resonant microcavity. Appl Phys Lett 2002; 80: 4057-9.
82. Klein EJ, Geuzebroek DH, Kelderman H, Gabriel S, Baker N et al. Reconfigurable optical add-drop multiplexer using microring resonators. IEEE Photon Technol Lett 2005; 17: 2358-60. (Pubitemid 41594817)
83. Rasras MS, Kun-Yii T, Gill DM, Young-Kai C, White AE et al. Demonstration of a tunable microwave-photonic notch filter using low-loss silicon ring resonators. J Lightwave Technol 2009; 27: 2105-10.
84. Armani DV, Kippenberg TJ, Spillane SM, VahalaKJ. Ultra-high-Q toroidmicrocavity on a chip. Nature 2003; 421: 925-8.
85. Soltani M, Yegnanarayanan S, Adibi A. Ultra-high Q planar silicon microdisk resonators for chip-scale silicon photonics. Opt Express 2007; 15: 4694-704. (Pubitemid 46609015)
86. Gondarenko A, Levy JS, Lipson M. High confinement micron-scale silicon nitride high Q ring resonator. Opt Express 2009; 17: 111-5.
87. Hosseini ES, Yegnanarayanan S, Atabaki AH, Soltani M, Adibi A. High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range. Opt Express 2009; 17: 14543-51.
88. Bauters JF, Heck MJ, John D, Barton JS, Bowers JE et al. Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding. Opt Express 2011; 19: 24090-101.
89. Dai D, Wang Z, Bauters JF, Tien MC, Heck MJ et al. Polarization characteristics of low-loss nano-core buried optical waveguides and directional couplers. 7th IEEE International Conference on Group IV Photonics (GFP); 1-3 September 2010; Beijing, China. IEEE Photonics Society, Beijing, China. pp 260-262.
90. Doerr CR, Okamoto K. Advances in silica planar lightwave circuits. J Lightwave Technol 2006; 24: 4763-88.
91. Barbarin Y, Leijtens XJ, Louzao CM, Kooiman JR, Smit MK. Extremely small AWG demultiplexer fabricated on InP by using a double-etch process. IEEE Photon Technol Lett 2004; 16: 2478.
92. Trinh PD, Yegnanarayanan S, Coppinger F, Jalali B. Silicon-on-insulator (SOI) phasedarray wavelength multi/demultiplexer with extremely low-polarization sensitivity. IEEE Photon Technol Lett 1997; 9: 940-2. (Pubitemid 127566569)
93. Dai D, Fu X, Shi Y, He S. Experimental demonstration of an ultra-compact Sinanowire- based reflective arrayed-waveguide grating (de)multiplexer with photonic crystal reflectors. Opt Lett 2010; 35: 2594-6.
94. Dai D, Wang Z, JulianN, Bowers JE. Compact broadband polarizer based on shallowly etched silicon-on-insulator ridge optical waveguides. Opt Express 2010; 18: 27404- 15.
95. Kokubun Y, Asakawa S. ARROW-type polarizer utilizing form birefringence in multilayer first cladding. IEEE Photon Technol Lett 1993; 5: 1418-20.
96. Li GY, Xu AS. Analysis of the TE-pass or TM-pass metal-clad polarizer with a resonant buffer layer. J Lightwave Technol 2008; 26: 1234-41.
97. Twu RC, Huang CC, Wang WS. TE-pass Zn-diffused LiNbO3 waveguide polarizer. Microwav Opt Technol Lett 2006; 48: 2312-4.
98. Cui Y, Wu Q, Schonbrun E, Tinker M, Lee JB et al. Silicon-based 2-D slab photonic crystal TM polarizer at telecommunication wavelength. IEEE Photon Technol Lett 2008; 20: 641-3. (Pubitemid 351493828)
99. Alessandro A, Bellini B, Donisi D, Beccherelli R, Asquini R. Nematic liquid crystal optical channel waveguides on silicon. IEEE J Quant Electron 2006; 42: 1084-90.
100. Wang Q, Ho ST. Ultracompact TM-pass silicon nanophotonic waveguide polarizer and design. IEEE J Photon 2010; 2: 49-56.