CO 2 laser machining of fully packaged autonomous microfluidic systems

DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Volumn , Issue , 2012, Pages 63-70

  Mohammed, M I ^a   Desmulliez, M P Y ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED SYSTEMS; CAPILLARY SYSTEM; CHANNEL DEPTH; ENERGY INPUTS; FABRICATION PROCEDURE; FLOWTHROUGH; LASER ETCHING; LASER MACHINING; LASER SYSTEMS; MICRO FLUIDIC SYSTEM; MICRO-FLUIDIC DEVICES; MICROFLUIDIC STRUCTURES; MINIMUM FEATURE SIZES; ON CHIPS; TYPE STRUCTURES; VALVE DESIGN;

DESIGN; ESTERS; FLUIDIC DEVICES; INTEGRATION; RAPID PROTOTYPING; TURNAROUND TIME;

CARBON DIOXIDE;

EID: 84864702427     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. D. J. Laser and J. G. Santiago - Topical Review: A review of micropumps - J. Micromech. Microeng. 14 (2004) R35-R64.
2. B. D. Iverson and S. V. Garimella - Recent advances in microscale pumping technologies: a review and evaluation - Microfluid Nanofluid (2008) 5:145-174.
3. D. Juncker, H. Schmid, U. Drechsler, H. Wolf, M. Wolf, B. Michel, N. Rooij, and E. Delamarche - Autonomous Microfluidic Capillary System - Anal. Chem. 2002, 74, 6139-6144.
4. M. Zimmermann, H. Schmid, P. Hunziker and E. Delamarche - Capillary pumps for autonomous capillary systems - Lab Chip, 2007, 7, 119-125.
5. C. Jönsson, M. Aronsson, G. Rundström, C. Pettersson, I. Mendel-Hartvig, J. Bakker, E. Martinsson, B. Liedberg, B. MacCraith, O. Ohman, J. Melin - Silane-dextran chemistry on lateral flow polymer chips for immunoassays - Lab Chip. 2008 Jul;8(7):1191-7.
6. 2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems - Lab Chip, 2002, 2, 242-246.
7. 2-laser micromachining of PMMA: the effect of polymer molecular weight - J. Micromech. Microeng. 18 (2008) 095020 (7pp).
8. H. Song, Y. Wang, and K. Pant - System-level simulation of liquid filling in microfluidic chips - Biomicrofluidics, 5, 024107 (2011).
9. A. A. Saha, S. K. Mitra, M. Tweedie, S. Roy and J. McLaughlin - Experimental and numerical investigation of capillary flow in SU8 and PDMS microchannels with integrated pillars - Microfluid Nanofluid (2009) 7:451-465
10. Frank M. White - Viscous fluid flow - McGraw-Hill, 1 Aug 1991 -614 pages
11. P. F. Man, C. H. Mastrangelo, M. A. Burns and D. T. Burke - Microfabricated capillarity-driven stop valve and sample injector - Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on, Jan 1998, 45-50, ISSN: 1084-6999, Print ISBN: 0-7803-4412-X.
12. M. Zimmermann, P. Hunziker and E. Delamarche - Valves for autonomous capillary systems - Microfluidics and Nanofluidics, Volume 5, Number 3, 395-402.
13. T. S. Leu and P. Y. Chang - Pressure barrier of capillary stop valves in micro sample separators - Sensors and Actuators A: Physical, Volume 115, Issues 2-3, 21 September 2004, Pages 508-515.