Three-dimensional graphoepitaxial alignment resulting from solid-state dewetting of Au films on surfaces with monoperiodic topography

Applied Physics Letters

Volumn 101, Issue 5, 2012, Pages

  Giermann, Amanda L ^a,b   Thompson, Carl V ^a  

^a Massachusetts Institute of Technology   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALED FILMS; AS-DEPOSITED FILMS; AU FILM; DE-WETTING; FLAT SURFACES; IN-PLANE ALIGNMENT; OXIDIZED SILICON; POLYCRYSTALLINE GOLD; SAW-TOOTH STRUCTURE;

ALIGNMENT; ANNEALING; GRAIN GROWTH; SILICON OXIDES; SURFACE PHENOMENA; TEXTURES; TOPOGRAPHY;

GOLD;

EID: 84864663695     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4740277     Document Type: Article

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