Investigation on mechanically bistable MEMS devices for energy harvesting from vibrations

Journal of Microelectromechanical Systems

Volumn 21, Issue 4, 2012, Pages 779-790

  Ando, Bruno ^a   Baglio, Salvatore ^a   L'Episcopo, Gaetano ^a   Trigona, Carlo ^a  

^a UNIVERSITY OF CATANIA   (Italy)

Author keywords

Bistable dynamical systems; compliant micromechanisms; electrostatic mechanical to electrical transduction; energy harvesting; mechanical vibrations; microelectromechanical systems (MEMS)

Indexed keywords

BISTABLE DYNAMICS; BISTABLES; BROAD BANDS; COMPLIANT MICROMECHANISMS; DEVICE DESIGN; DEVICE PERFORMANCE; DIFFERENT STRUCTURE; ELECTRIC ENERGIES; ENERGY HARVESTING FROM VIBRATIONS; FABRICATION PROCESS; INERTIAL MASS; LOW FREQUENCY; LOW FREQUENCY RANGE; MECHANICAL ENERGIES; MEMSDEVICES; MICRO DEVICES; MONOSTABLE; STATIC AND DYNAMIC; WORKING CONDITIONS;

COMPLIANT MECHANISMS; DYNAMICAL SYSTEMS; ELECTROMECHANICAL DEVICES; ELECTROSTATICS; ENERGY HARVESTING; KINETIC ENERGY; MEMS;

VIBRATIONS (MECHANICAL);

EID: 84864582228     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2192912     Document Type: Article

References (44)

1. S. Priya and D. Inman, Energy Harvesting Technologies. New York: Springer-Verlag, 2008.
2. R. Torah, P. Glynne-Jones, M. Tudor, T. O'Donnell, S. Roy, and S. Beeby, "Self-powered autonomous wireless sensor node using vibration energy harvesting," Meas. Sci. Technol., vol. 19, no. 12, p. 125 202, Dec. 2008.
3. V. Raghunathan, A. Kansal, J. Hsu, J. Friedman, and M. Srivastava, "Design considerations for solar energy harvesting wireless embedded systems," in Proc. 4th Int. Symp. Inf. Process. Sensor Netw., 2005, pp. 459-462.
4. H. Sodano, D. Inman, and G. Park, "Comparison of piezoelectric energy harvesting devices for recharging batteries," J. Intell. Mater. Syst. Struct., vol. 16, no. 10, pp. 799-807, Oct. 2005. (Pubitemid 41498481)
5. S. Anton and D. Inman, "Vibration energy harvesting for unmanned aerial vehicles," in Proc. SPIE, 2008, vol. 6928, pp. 692824-1-692824-12.
6. A. Kuo, "Biophysics: Harvesting energy by improving the economy of human walking," Science, vol. 309, no. 5741, pp. 1686-1687, Sep. 2005. (Pubitemid 41285929)
7. M. Lallart, D. Guyomar, Y. Jayet, L. Petit, E. Lefeuvre, T. Monnier, P. Guy, and C. Richard, "Synchronized switch harvesting applied to self-powered smart systems: Piezoactive microgenerators for autonomous wireless receivers," Sens. Actuators A, Phys., vol. 147, no. 1, pp. 263-272, 2008.
8. S. Roundy, P. Wright, and J. Rabaey, "A study of low level vibrations as a power source for wireless sensor nodes," Comput. Commun., vol. 26, no. 11, pp. 1131-1144, 2003.
9. E. Yeatman, "Energy harvesting from motion using rotating and gyroscopic proof masses," Proc. Inst. Mech. Eng., J. Mech. Eng. Sci., vol. 222, no. 1, pp. 27-36, 2008. (Pubitemid 351217746)
10. S. Roundy, "On the effectiveness of vibration-based energy harvesting," J. Intell. Mater. Syst. Struct., vol. 16, no. 10, pp. 809-823, Oct. 2005. (Pubitemid 41498482)
11. S. Beeby, M. Tudor, E. Koukharenko, N. White, T. O'Donnell, C. Saha, S. Kulkarni, and S. Roy, "Micromachined silicon generator for harvesting power from vibrations," in Proc. 4th Int. Workshop Micro Nanotechnol. PowerMEMS, Nov. 2004, pp. 104-107.
12. B. Yen and J. Lang, "A variable-capacitance vibration-to-electric energy harvester," IEEE Trans. Circuits Syst. I, Reg. Papers, vol. 53, no. 2, pp. 288-295, Feb. 2006. (Pubitemid 46395405)
13. S. Anton and H. Sodano, "A review of power harvesting using piezoelectric materials (2003-2006)," Smart Mater. Struct., vol. 16, no. 3, pp. R1-R21, Jun. 2007. (Pubitemid 46804867)
14. S. Beeby, M. Tudor, and N. White, "Energy harvesting vibration sources for microsystems applications," Meas. Sci. Technol., vol. 17, no. 12, pp. 175-195, 2006.
15. T. Sterken, K. Baert, C. Van Hoof, R. Puers, G. Borghs, P. Fiorini, I.MCP, and B. Leuven, "Comparative modelling for vibration scavengers MEMS energy scavengers," in Proc. IEEE Sensors, 2004, pp. 1249-1252. (Pubitemid 41668184)
16. P. Mitcheson, E. Reilly, T. Toh, P. Wright, and E. Yeatman, "Performance limits of the three MEMS inertial energy generator transduction types," J. Micromech. Microeng., vol. 17, no. 9, pp. S211-S216, Sep. 2007.
17. B. Mann and N. Sims, "Energy harvesting from the nonlinear oscillations of magnetic levitation," J. Sound Vib., vol. 319, no. 1/2, pp. 515-530, 2009.
18. D. Zhu, M. Tudor, and S. Beeby, "Strategies for increasing the operating frequency range of vibration energy harvesters: A review," Meas. Sci. Technol., vol. 21, no. 2, p. 022001, Feb. 2010.
19. S. Shahruz, "Design of mechanical band-pass filters for energy scavenging," J. Sound Vibration, vol. 292, no. 3-5, pp. 987-998, May 2006.
20. M. Soliman, E. Abdel-Rahman, E. El-Saadany, and R. Mansour, "A wideband vibration-based energy harvester," J. Micromech. Microeng., vol. 18, no. 11, p. 115 021, Nov. 2008.
21. R. Ramlan, M. Brennan, B. Mace, and I. Kovacic, "Potential benefits of a non-linear stiffness in an energy harvesting device," Nonlinear Dyn., vol. 59, no. 4, pp. 545-558, 2010.
22. F. Cottone, H. Vocca, and L. Gammaitoni, "Nonlinear energy harvesting," Phys. Rev. Lett., vol. 102, no. 8, pp. 080601-1-080601-4, Feb. 2009.
23. T. Wellens, V. Shatokhin, and A. Buchleitner, "Stochastic resonance," Rep. Progr. Phys., vol. 67, no. 1, pp. 45-105, 2004. (Pubitemid 38185119)
24. M. Ferrari, V. Ferrari, M. Guizzetti, B. Andò, S. Baglio, and C. Trigona, "Improved energy harvesting from wideband vibrations by nonlinear piezoelectric converters," Procedia Chem., vol. 1, no. 1, pp. 1203-1206, Sep. 2009.
25. K. Dogheche, B. Cavallier, P. Delobelle, L. Hirsinger, E. Cattan, D. Remiens, M. Marzencki, B. Charlot, S. Basrour, and S. Ballandras, "A bi-stable micro-machined piezoelectric transducer for mechanical to electrical energy transformation," Integr. Ferroelectr., vol. 80, no. 1, pp. 305-315, 2006. (Pubitemid 44014024)
26. B. Andò, S. Baglio, C. Trigona, N. Dumas, L. Latorre, and P. Nouet, "Nonlinear mechanism in MEMS devices for energy harvesting applications," J. Micromech. Microeng., vol. 20, no. 12, pp. 125 020-1-125 020-12, Dec. 2010.
27. B. Marinkovic and H. Koser, "Smart sand-A wide bandwidth vibration energy harvesting platform," Appl. Phys. Lett., vol. 94, no. 10, pp. 103505-1-103505-3, Mar. 2009.
28. D. Nguyen, E. Halvorsen, G. Jensen, and A. Vogl, "Fabrication and characterization of a wideband MEMS energy harvester utilizing nonlinear springs," J. Micromech. Microeng., vol. 20, no. 12, p. 125 009, Dec. 2010.
29. S. Jung and K. Yun, "A wideband energy harvesting device using snapthrough buckling for mechanical frequency-up conversion," in Proc. IEEE 23rd Int. Conf. MEMS, 2010, pp. 1207-1210.
30. A. Hajati, S. Bathurst, H. Lee, and S. Kim, "Design and fabrication of a nonlinear resonator for ultra wide-bandwidth energy harvesting applications," in Proc IEEE 24th Int. Conf. MEMS, 2011, pp. 1301-1304.
31. M. Parkinson, B. Jensen, and G. Roach, "Optimization-based design of a fully-compliant bistable micromechanism," in Proc. ASME DETC/MECH, 2000, p. 14119.
32. P. Boyle, D. Moore, R. Breen, R. Syms, H. Zou, and J. Stagg, "MEMS bistable clamp with electrical locking and release," in Proc. 15th Micromech. Workshop, MME, 2005, vol. 4, pp. 5-7.
33. J. Tsay, H. Chang, and C. Sung, "Design and experiments of fully compliant bistable micromechanisms," Mech. Mach. Theory, vol. 40, no. 1, pp. 17-31, Jan. 2005.
34. J. Casals-Terre and A. Shkel, "Dynamic analysis of a snap-action micromechanism," Proc. IEEE Sensors, pp. 1245-1248, 2004. (Pubitemid 41668183)
35. L. Howell, Compliant Mechanisms. New York: Wiley, 2001.
36. B. Andò, S. Baglio, M. Baku, V. Ferrari, E. Sardini, N. Savalli, M. Serpelloni, and C. Trigona, "Numerical and experimental investigation on contactless resonant sensors," Sens. Actuators A, Phys., vol. 162, no. 2, pp. 329-335, Aug. 2010.
37. B. Andò, S. Baglio, G. L'Episcopo, V. Marletta, N. Savalli, and C. Trigona, "A BE-SOI MEMS for inertial measurement in geophysical applications," IEEE Trans. Instrum. Meas., vol. 99, no. 5, pp. 1901-1908, May 2011.
38. V. Lindroos, M. Tilli, A. Lehto, and T. Motooka, Handbook of Silicon Based MEMS Materials and Technologies. Norwich, NY: William Andrew, 2010.
39. P. Kloeden and E. Platen, Numerical Solution of Stochastic Differential Equations. New York: Springer-Verlag, 1995.
40. R. Lensink, H. Bo, and E. Sterken, Investment, Capital Market Imperfections, and Uncertainty: Theory and Empirical Results. Aldershot, U.K.: Edward Elgar, 2001.
41. S. Meninger, J. Mur-Miranda, R. Amirtharajah, A. Chandrakasan, and J. Lang, "Vibration-to-electric energy conversion," IEEE Trans. VLSI Syst., vol. 9, no. 1, pp. 64-76, Feb. 2001. (Pubitemid 32922812)
42. S. Baglio, S. Castorina, and N. Savalli, Scaling Issues and Design of MEMS. New York: Wiley, 2007.
43. Y. Cho, A. Pisano, and R. Howe, "Viscous damping model for laterally oscillating microstructures," J. Microelectromech. Syst., vol. 3, no. 2, pp. 81-87, Jun. 1994.
44. P. Mitcheson, T. Sterken, C. He,M. Kiziroglou, E. Yeatman, and R. Puers, "Electrostatic microgenerators," Meas. Control, vol. 41, no. 4, pp. 114-119, 2008.