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Volumn 71-72, Issue , 2012, Pages 48-53

Evaluation of the oscillator frequency of a free running RF generator as a diagnostic tool for inductively coupled plasma-optical emission spectrometry

Author keywords

Plasma diagnostic; Plasma stability; RF generator frequency

Indexed keywords

CENTRAL CHANNELS; CHARACTERISTIC FREQUENCIES; DIAGNOSTIC INFORMATION; DIAGNOSTIC TOOLS; EXCITATION TEMPERATURE; FREQUENCY COUNTERS; FREQUENCY MEASUREMENTS; INDUCTIVELY COUPLED PLASMA-OPTICAL EMISSION SPECTROMETRY; LINEAR DEPENDENCE; MG II/MG I; OSCILLATOR FREQUENCY; PLASMA CONDITIONS; RF GENERATORS; ROTATIONAL TEMPERATURE; SPECTROSCOPIC PLASMA DIAGNOSTICS;

EID: 84864441753     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2012.05.002     Document Type: Conference Paper
Times cited : (8)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.