Complementary metal-oxide-semiconductor compatible high efficiency subwavelength grating couplers for silicon integrated photonics

Applied Physics Letters

Volumn 101, Issue 3, 2012, Pages

  Xu, Xiaochuan ^a   Subbaraman, Harish ^b   Covey, John ^a   Kwong, David ^a   Hosseini, Amir ^b   Chen, Ray T ^a  

^a The University of Texas at Austin   (United States)

^b OMEGA OPTICS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3 DB BANDWIDTH; AIR HOLES; BURIED OXIDES; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; COUPLING EFFICIENCY; FABRICATION PROCESS; GRATING COUPLERS; INTEGRATED PHOTONICS; SILICON ON INSULATOR; SUB-WAVE LENGTH GRATING; SUB-WAVELENGTH; TRANSVERSE ELECTRIC MODES;

PHOTONICS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 84864258461     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4737412     Document Type: Article

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