Optimal tuning of epitaxy pyrometers

ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings

Volumn , Issue , 2012, Pages 294-299

  Susto, Gian Antonio ^a   Pampuri, Simone ^b   Schirru, Andrea ^b   Beghi, Alessandro ^a  

^a UNIVERSITY OF PADOVA   (Italy)

^b UNIVERSITY OF PAVIA   (Italy)

Author keywords

Multi task Learning; Predictive Maintenance; Semiconductor Epitaxial Layer; Semiconductor Manufacturing

Indexed keywords

DATA SETS; MULTITASK LEARNING; ON-WAFER; OPTIMAL TUNING; PREDICTIVE MAINTENANCE; PROCESS ENGINEER; SEMICONDUCTOR EPITAXIAL LAYERS; SEMICONDUCTOR MANUFACTURING; STATISTICAL TOOLS; WAFER TEMPERATURE;

ELECTROMAGNETIC WAVE EMISSION; ENGINEERS; MAINTENANCE; PYROMETERS; PYROMETRY; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; STATISTICAL MECHANICS;

EPITAXIAL GROWTH;

EID: 84863921257     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASMC.2012.6212914     Document Type: Conference Paper

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