A MEMS doubly decoupled gyroscope with wide driving frequency range

IEEE Transactions on Industrial Electronics

Volumn 59, Issue 12, 2012, Pages 4921-4929

  Tsai, Chun Wei ^a   Chen, Kai Hsin ^a   Shen, Ching Kai ^a   Tsai, Jui Che ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Angular rate sensor; doubly decoupled structure; MEMS gyroscope; wide driving frequency range

Indexed keywords

ANGULAR RATE SENSORS; BANDWIDTH ENHANCEMENT; DOUBLY DECOUPLED; DRIVING FREQUENCIES; DRIVING VOLTAGES; EASE-OF-USE; FABRICATION IMPERFECTIONS; FREQUENCY MATCHING; FREQUENCY-TUNING; MEMS GYROSCOPE; OVERLAPPING REGIONS; PERFORMANCE TESTS; Q-FACTORS; RESONANCE BAND; ROTATION RATE; WIDE BANDWIDTH;

BANDWIDTH; ELECTROMECHANICAL DEVICES; MEMS;

GYROSCOPES;

EID: 84863739524     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2011.2177612     Document Type: Article

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