Fabrication of 70nm split ring resonators by nanoimprint lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8423, Issue , 2012, Pages

  Sharp, Graham J ^a   Khokhar, Ali Z ^a   Johnson, Nigel P ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

Author keywords

high resolution; metamaterials; nanoimprint lithography; split ring resonators

Indexed keywords

BACKSCATTERED ELECTRONS; E-BEAM LITHOGRAPHY; FABRICATION METHOD; FABRICATION TECHNIQUE; HIGH RESOLUTION; HIGH-RESOLUTION PATTERNS; LC RESONANCE; MAGNETIC RESPONSE; METAL DEPOSITION; MINIMUM FEATURE SIZES; NANO-IMPRINTING; NANOIMPRINT STAMPS; PROXIMITY EFFECTS; SHORT WAVELENGTHS; SILICON SUBSTRATES; SPLIT RING RESONATOR; TRANSVERSE ELECTRIC POLARISATION; U-SHAPED; VISIBLE SPECTRA;

ELECTRON BEAM LITHOGRAPHY; FABRICATION; METAMATERIALS; OPTICAL RESONATORS; RING GAGES;

NANOIMPRINT LITHOGRAPHY;

EID: 84863539227     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.922750     Document Type: Conference Paper

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