Adsorption mechanisms of NH 3 on chlorinated Si(100)-2 × 1 surface

Bulletin of the Korean Chemical Society

Volumn 33, Issue 3, 2012, Pages 775-778

  Lee, Hee Soon ^a   Choi, Cheol Ho ^a  

^a Kyungpook National University   (South Korea)

Author keywords

Ab initio; Ammonia; Mechanism; Silicon surface; SIMOMM

Indexed keywords

AB INITIO; ADSORPTION MECHANISM; AMMONIA ADSORPTION; AMMONIA MOLECULES; AMMONIA NITROGEN; COOPERATIVE EFFECTS; MOLECULAR DESORPTION; NUCLEOPHILIC ATTACK; REACTION BARRIERS; SI(1 0 0); SILICON SURFACE; SIMOMM; SURFACE CHEMICAL MODIFICATIONS; SYMMETRIC SURFACES; TRANSITION STATE; WATER ADSORPTION;

AMMONIA; CHEMICAL MODIFICATION; CHLORINE; MECHANISMS; MOLECULES; QUANTUM CHEMISTRY; SILICON; SUBSTITUTION REACTIONS;

GAS ADSORPTION;

EID: 84863379423     PISSN: 02532964     EISSN: 12295949     Source Type: Journal    
DOI: 10.5012/bkcs.2012.33.3.775     Document Type: Article

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