46.3: OLED manufacturing system equipped by planar evaporation source

Digest of Technical Papers - SID International Symposium

Volumn 41 1, Issue , 2010, Pages 695-698

  Fujimoto, Eishi ^a   Daiku, Hiroyuki ^a   Kamikawa, Kenji ^a   Fujimoto, Emiko ^a   Matsumoto, Yuji ^a  

^a HITACHI ZOSEN CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; EVAPORATION;

DEPOSITION PROCESS; EVAPORATION SOURCE; MANUFACTURING EQUIPMENT; ORGANIC LAYERS; ORGANIC VAPORS; PLANAR SOURCES; PROCESS CHAMBERS; VALVE SWITCHING;

ORGANIC LIGHT EMITTING DIODES (OLED);

EID: 84863330150     PISSN: 0097966X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1889/1.3500563     Document Type: Conference Paper

References (0)