Optical and electrical properties of Al2O3 films grown by aerosol deposition

Journal of the Australian Ceramic Society

Volumn 48, Issue 1, 2012, Pages 64-68

  Uemichi, Y ^a   Takino, J ^a   Nishikawa, K ^a   Sato, Y ^a   Yoshikado, S ^a  

^a DOSHISHA UNIVERSITY   (Japan)

Author keywords

Aerosol deposition method; Al 2O 3; Dielectric breakdown voltage; Optical transmittance; Particle size distribution; Room temperature impact consolidation; Surface roughness; Thin films

Indexed keywords

ABSORPTION COEFFICIENTS; AEROSOL DEPOSITION; AEROSOL DEPOSITION METHOD; AL2O3 FILMS; AVERAGE DIAMETER; BREAKDOWN ELECTRIC FIELD; OPTICAL AND ELECTRICAL PROPERTIES; OPTICAL LIGHT; ROOM TEMPERATURE; ROOM-TEMPERATURE-IMPACT-CONSOLIDATION; WAVELENGTH RANGES;

ALUMINUM; DEPOSITS; ELECTRIC BREAKDOWN; ELECTRIC FIELDS; ELECTRIC PROPERTIES; FLOW OF GASES; FLOW RATE; OPACITY; PARTICLE SIZE ANALYSIS; RESPIRATORY MECHANICS; SINTERING; SURFACE ROUGHNESS; THIN FILMS;

OPTICAL FILMS;

EID: 84863314168     PISSN: 0004881X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)

1. J. Akedo and M. Lebedev, "Microstructure and Electrical Properties of Lead Zirconate (Pb(Zr0.52/Ti0.48)O3) Thick Films Deposited by Aerosol Deposition Method", Jpn. J. Appl. Phys., Vol. [38], (1999), 5397-5401. (Pubitemid 30514640)
2. J. Akedo, "Aerosol Deposition Method for Application to Electric Devices", Journal of The Surface Finishing Society of Japan, Vol. [56], (2005), 580-581.
3. J. Akedo, M. Lebedev, A. Iwata, H. Ogiso and S. Nakano, "Aerosol Deposition Method (ADM) for Nano-crystal Ceramics Coating without Firing", Mat. Res. Soc. Symp. Proc., Vol. [778], (2003), U8.10.1/W7.10.3.